Measuring device and measuring method of wide-range flatness
A measuring device and flatness technology, which is applied in the field of large-scale flatness measuring devices, can solve the problems of complex operation, expensive equipment, and long time-consuming for large-scale planes
Active Publication Date: 2014-03-12
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology
The non-contact measurement adopted later, such as laser measuring instrument, has improved the measurement accuracy, but the equipment is expensive, the operation is complicated, and the requirements for operators are high. It takes a long time to measure large-size planes, and it is only suitable for small and medium planes. degree measurement
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[0028] The invention performs measurement according to the detection principle of an autocollimator, and the large-scale flatness measuring device includes a high-precision autocollimator, an orthorhombic prism group and a rotatable connection device. During measurement, the measuring head of the orthorhombic prism is aimed at the plane to be measured, and the flatness of the plane to be measured is measured by a high-precision autocollimator, wherein the parallel light path emitted by the high-precision autocollimator passes through two rhomboidal prisms, After the two reflections of each rhombic prism, the outgoing light vector is the same as the original incident light vector, that is, the light path refracted by each rhomboidal prism after two reflections does not affect the outgoing light vector. The optical path passes through the orthorhombic prism to the high-precision autocollimator, and then the flatness measurement of the measured plane can be realized. The two rhom...
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The invention provides a measuring device and a measuring method of wide-range flatness, thereby conveniently and rapidly carrying out effective measurement on the wide-range flatness. The measuring device of the wide-range flatness comprises a high-precision autocollimator, an orthorhombic prism group and a rotating connecting device; when the measuring device is used for measuring, a measurement head of each orthorhombic prism aims at a plane to be measured, and the high-precision autocollimator measures the flatness of the plane to be measured, wherein the parallel light path emitted by the high-precision autocollimator passes through two orthorhombic prisms, and emergent light vector and original incident light vector are same through two-time reflection of each orthorhombic prism, namely the replicate light path of each orthorhombic prism does not influences the emergent light vector through the two-time reflection; and the light path of the plane to be measured after reflection passes through the orthorhombic prisms to the high-precision autocollimator, thereby realizing the measurement of the flatness of the plane to be measured.
Description
technical field [0001] The invention relates to a large-scale flatness measuring device and a measuring method thereof. Background technique [0002] Flatness measurement is mainly used to detect and calibrate the surface flatness of flat-plate DUTs such as collimator calibrated reflection planes, high-precision flat mirrors and prisms and other calibration instruments and precision devices. The level meter is a commonly used flatness measuring instrument. It is small in size, easy to carry, and relatively simple to measure. Therefore, the level meter measurement method is a relatively common flatness measurement method, but the level meter can only be read visually, and the accuracy is low. And it is a contact measurement with the surface to be measured, which is destructive to a certain extent and is not suitable for use on a plane requiring high precision. The non-contact measurement adopted later, such as laser measuring instrument, has improved the measurement accuracy...
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IPC IPC(8): G01B11/30
Inventor 肖茂森吴易明李春艳刘爱敏陆卫国
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI