Precise two-degree of freedom micro-displacement positioning device

Abstract

The invention relates to a precise two-degree of freedom micro-displacement positioning device, belonging to a micrometric displacement operating system. In order to solve the defects of the prior art, including the problems that the positioning precision is low and interference between different degrees of freedom is large, the device comprises an objective table, a base plate, four nested parallelogram flexible link mechanisms with same shapes and structures, four groups of parallelogram guide mechanisms with same shapes and structures, a first piezoelectric actuator and a second piezoelectric actuator. The precise positioning device has the beneficial effects that a bridge type amplification mechanism is eliminated, a driving mode is changed, and the positioning precision is improved as the piezoelectric actuators are adopted for driving directly; two different flexible link mechanisms are adopted for the device, so as to realize the mutual independent movement of each degree of freedom; as no disturbance exists between the degrees of freedoms, the positioning precision is further improved; and furthermore, the whole structure is completely symmetric except for the piezoelectric actuators, thereby ensuring that the positioning precision of the whole device is not affected during change of the outside temperature conditions.

Description

technical field [0001] The invention relates to a two-degree-of-freedom micro-displacement precision positioning device, which belongs to a micro-displacement operating system. Background technique [0002] Now, nanometer-level high-precision positioning technology has been widely used in many fields and played an important role, such as optical detection, micro-electromechanical systems (MEMS), and microelectronics. Due to its advantages of no friction, no gap, and no lubrication, the flexible hinge overcomes the shortcomings of the traditional positioning and guiding mechanism. Through the combination with the micro-nano driver, it plays an important role in the nano-scale micro-motion positioning technology. Most jogging mechanisms use flexible hinges. [0003] The prior art closest to the present invention is a two-degree-of-freedom flexible control platform mentioned in the article "Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator" ...

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Problems solved by technology

[0004] But the above-mentioned structure has the following defects: 1, though the stroke of the mechanism can be enlarged by the amplifying mechanism, the positioning accuracy of the structure is reduced; During the movement, the driver will be driven to move together, and the vibration generated by the driver dragging its cable will reduce the accuracy of the whole mechanism; 3. The tangential effect of the nested parallelogram flexible linkage mechanism on the displacement output end of the bridge amplification mechanism The bending moment generated by the force will reduce the straightness of motion of a single degree of freedom, and at the same time will cause a large disturbance between the two degrees of freedom

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