Method for preventing microscope on Cascade probe station from striking probe

Abstract

The invention relates to the manufacturing field of semiconductors, and in particular relates to a method for preventing a microscope on a Cascade probe station from striking a probe. A cross beam is provided with a range sensor; and when a lens cone of the microscope is excessively close to the probe, a warning device sends a warning signal for reminding an operator of the microscope for stopping the action of enabling the microscope to be close to the probe so that the condition that an object lens of the microscope strikes the cross beam of the probe station due to the excessive descending of the microscope to enable the cross beam to partially deform or break is avoided.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuits and its manufacture, in particular to a method for preventing a Cascade probe station microscope from striking a needle. Background technique [0002] Because the traditional Cascade probe station has no effective measures to limit the height of the microscope drop, it cannot prevent the microscope from colliding with the needle holder during misuse. If the microscope is lowered too much, the objective lens of the microscope will hit the beam of the needle holder, resulting in partial deformation of the beam or be crushed. [0003] figure 1 It is the structural representation of the traditional Cascade probe station in the background technology of the present invention; figure 1 As shown, in order to clearly see the probe 13 and the sample during the use of the Cascade probe station, the focus must be completed by adjusting the height of the microscope barrel 14. If the user does...

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Problems solved by technology

[0002] Because the traditional Cascade probe station has no effective measures to limit the height of the microscope drop, it cannot prevent the microscope from colliding with the needle holder during misuse. If the microscope is lowered too much, the objective lens of the microscope will hit the beam of the needle holder, resulting in partial deformation of the beam or be crushed

[0003] figure 1 It is the structural representation of the traditional Cascade probe station in the background technology of the present invention; figure 1 As shown, in order to clearly see the probe 13 and the sample during the use of the Cascade probe station, the focus must be completed by adjusting the height of the microscope barrel 14. If the user does not operate properly or other conditions will cause the microscope barrel 14 to drop in height Too much impact on the needle seat beam 12, causing the needle seat beam 12 to be partially deformed or broken

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