Evaporator based on heat conduction oil evaporation mechanism

Abstract

The invention discloses an evaporator based on a heat conduction oil evaporation mechanism, which comprises an evaporation container, and is characterized in that the side wall of the evaporation container is internally provided with an interlayer which is internally provided with a spiral heat conduction oil duct surrounding the evaporation container; meanwhile, the side wall of the evaporation container is provided with a heat conduction oil inlet and a heat conduction oil outlet which are respectively connected with the two ends of the spiral heat conduction oil duct. According to the evaporator, an evaporator source is heated in a large area by the interlayer, and the spiral heat conduction oil duct is used for guiding heat conduction oil to spirally flow, so that the problem of uneven oil temperature distribution of the heat conduction oil in the interlayer can be solved; and compared with the prior art, the evaporator is larger in heating area and more even in heating, so that the evaporation effect and the unit area evaporation efficiency of the evaporator can be greatly improved.

Description

technical field [0001] The invention relates to an evaporator based on a thermal oil evaporation mechanism. Background technique [0002] Due to the advantages of high deposition rate and large deposition area, metal-organic chemical vapor deposition (MOCVD) is an ideal method for preparing high-quality REBa 2 Cu 3 o 7 -δ (RE stands for Rare Earth, representing Y, Sm, Gd and other rare earth metal elements) is one of the preferred processes for high-temperature superconducting thin film coating conductor materials. The metal-organic sources used in the MOCVD process, represented by M(TMHD)x (M=Y, Ba, Cu, etc.), often have very different evaporation, sublimation and decomposition temperatures due to different metal ions. In order to avoid the difficulty in controlling the composition of high-temperature superconducting thin films due to the differences in the evaporation, sublimation and decomposition properties of each metal-organic source, the researchers developed a sin...

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Problems solved by technology

Although this heating method slightly improves the evaporation efficiency compared with electric heating, it still has the following defects: due to the barrier between the heat conduction oil pipe wall and the evaporator wall, it is difficult to transfer heat effectively, thereby reducing the evaporator The heating effect limits the further improvement of evaporation efficiency to a large extent

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