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Electrophotographic photosensitive member and electrophotographic apparatus

A photosensitive member, electrophotography technology, applied in optics, electrography, instruments, etc., can solve problems such as insufficient adhesion, achieve the effects of excellent photosensitive characteristics and charging characteristics, degradation suppression, and sufficient image forming ability

Inactive Publication Date: 2012-09-19
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The surface deterioration of the surface layer is improved by using a surface layer formed of non-single crystal hydrogenated carbon, but when the surface layer composed of non-single crystal hydrogenated carbon is formed on the upper charge injection prevention layer formed of a-SiC, there is adhesion Insufficient situation

Method used

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  • Electrophotographic photosensitive member and electrophotographic apparatus
  • Electrophotographic photosensitive member and electrophotographic apparatus
  • Electrophotographic photosensitive member and electrophotographic apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0099] On a cylindrical substrate (an aluminum cylindrical substrate having a diameter of 80mm, a length of 358mm and a thickness of 3mm, and mirror-polished), by using figure 2 An electrophotographic photosensitive member to be negatively charged was produced under the following conditions shown in Table 1 using the plasma processing apparatus shown and a high-frequency power source using an RF band as a frequency. At this time, a lower charge injection preventing layer, a photoconductive layer, an upper charge injection preventing layer, and a surface layer are formed in this order (layer formation). In addition, when forming the surface layer, set high-frequency power, SiH 4 Flow rate and CH 4 flow rate. In addition, for each film-forming condition, an electrophotographic photosensitive member to be negatively charged was produced.

[0100]The produced electrophotographic photosensitive member to be negatively charged was installed in an electrophotographic apparatus ha...

Embodiment 2

[0184] Two electrophotographic photosensitive members to be negatively charged were produced in the same manner as in Example 1 except that the surface layers were produced under the conditions shown in Table 7 below.

[0185] The produced electrophotographic photosensitive member to be negatively charged was evaluated in a similar manner to Example 1.

[0186] These results are shown in Tables 9 and 10. In addition, the boron atom content was 300 atomic ppm±10 atomic ppm relative to the silicon atom content in the upper charge injection preventing layer, and C / (Si+C) in the upper charge injection preventing layer was 0.30±0.01.

[0187] Table 7

[0188] Film forming condition No.

Embodiment 3

[0202] Two electrophotographic photosensitive members to be negatively charged were produced in the same manner as in Example 1 except that the surface layers were produced under the conditions shown in Table 11 below.

[0203] The produced electrophotographic photosensitive member to be negatively charged was evaluated in a similar manner to Example 1.

[0204] These results are shown in Tables 12 and 13 together with the results of film formation condition No. 10 in Example 2. In addition, the boron atom content was 300 atomic ppm±10 atomic ppm relative to the silicon atom content in the upper charge injection preventing layer, and C / (Si+C) in the upper charge injection preventing layer was 0.30±0.01.

[0205] Table 11

[0206] Film forming condition No.

17

18

19

20

21

22

23

24

25

SiH 4 [mL / min(standard)]

26

26

32

26

26

26

26

26

26

CH 4 [mL / ...

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PUM

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Abstract

The present invention provides an electrophotographic photosensitive member having an a-SiC upper charge injection inhibition layer and an a-SiC surface layer, which is superior in adhesiveness, suppresses the surface deterioration, is superior in sensitivity characteristics and charging characteristics, and can keep an adequate image-forming capability for a long period of time. The upper charge injection inhibition layer contains 10 atom ppm or more and 30,000 atom ppm or less of the Group 13 atoms or the Group 15 atoms of the Periodic Table with respect to silicon atoms in the upper charge injection inhibition layer, and the ratio (C / (Si+C)) of the number of carbon atoms in the upper charge injection inhibition layer with respect to the sum of the number of silicon atoms and the number of the carbon atoms in the upper charge injection inhibition layer is 0.10 or more and 0.60 or less; and the sum of the atom density of the silicon atoms and the atom density of the carbon atoms in the surface layer is 6.60 1022 atoms / cm3 or more, and the ratio (C / (Si+C)) of the number of carbon atoms with respect to the sum of the number of silicon atoms and the number of the carbon atoms in the surface layer is 0.61 or more and 0.75 or less.

Description

technical field [0001] The present invention relates to an electrophotographic photosensitive member having a surface layer formed of hydrogenated amorphous silicon carbide (hereinafter, also referred to as “a-SiC”), and an electrophotographic apparatus having the electrophotographic photosensitive member. Hereinafter, the surface layer formed of "a-SiC" is also referred to as "a-SiC surface layer". Background technique [0002] An electrophotographic photosensitive member having a photoconductive layer (photosensitive layer) formed of amorphous silicon (hereinafter also referred to as "a-Si") on a substrate is known. Hereinafter, the photoconductive layer formed of a-Si is also referred to as "a-Si photoconductive layer". In particular, an a-Si electrophotographic photosensitive member (hereinafter also referred to as "a-Si photosensitive member") having an a-Si photoconductive layer formed on a conductive substrate such as metal using film-forming techniques such as CVD a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03G5/08
CPCG03G5/08235G03G5/08214
Inventor 植田重教古岛聪
Owner CANON KK
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