Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Metering type high-precision x-ray microscope sample scanning table

A technology of X-ray and sample stage, which is applied in the field of metrology high-precision X-ray microscope scanning sample stage, which can solve the problems of imaging error, precision error, sample position offset, etc.

Active Publication Date: 2012-09-26
天津三英精密仪器股份有限公司
View PDF4 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The accuracy error of the CT scanning sample stage is mainly produced by the key parts during its processing and assembly process, resulting in radial runout, axial runout and axis swing of the observation center of the sample during the scanning process, and the position error of the rotating shaft during the rotation of the turntable will be Causes a shift in sample position, which in turn leads to imaging errors
The accuracy of the general-purpose scanning sample stage is generally difficult to meet the needs of high-resolution imaging, so that there is a certain distortion between the scanning result and the actual structure of the scanned object. Therefore, it is necessary to measure and correct the runout and swing errors of the scanning stage rotation axis

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Metering type high-precision x-ray microscope sample scanning table
  • Metering type high-precision x-ray microscope sample scanning table
  • Metering type high-precision x-ray microscope sample scanning table

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with specific embodiments.

[0018] refer to Figure 2 ~ Figure 4 The scanning turntable 2 is installed on the fixed base 1, and the upper part of the scanning turntable 2 is fixedly installed with a three-dimensional positioning platform 6. The three-dimensional positioning platform includes three platforms that can move freely along the x, y, and z directions respectively. During operation, the z-direction platform can move along the guide rail fixedly installed on the scanning turntable 2, the x-direction platform can move along the guide rail fixedly installed on the z-direction platform, and the y-direction platform can move along the guide rail fixedly installed on the x-direction platform. By adjusting the positions of the three platforms, the precise positioning of the sample scanning position in three directions can be realized. The sensor mounting seat 3 is installed on the outside of the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a metering type high-precision x-ray microscope sample scanning table. A scanning rotary table (2) is arranged on a fixed base (1) and is used for providing rotary scanning motion needed by a scanned sample; a three-dimensional positioning platform (6) is fixedly arranged on the upper part of the scanning rotary table (6); a sensor installation seat (3) is arranged outside the fixed base (1); a radial run-out error measuring sensor (4) and an axial run-out error and swing error measuring sensor group (5) are respectively arranged on the sensor installation seat (3); a sample strand (8) is fixed above a y-direction platform. The metering type high-precision x-ray microscope sample scanning table can achieve real-time measuring of radial errors, axial errors, and swing error of a rotary shaft in a rotary process of the sample scanning table; a measured error result can be used for carrying out error correction on the motion of the sample, so that the difficulty of three-dimensional image reconstructing distortion caused by precision error of the sample scanning table can be solved.

Description

technical field [0001] The invention belongs to the technical field of micro-CT scanning imaging, in particular to a measurement-type high-precision X-ray microscope scanning sample stage. Background technique [0002] In recent years, micro-CT technology has received increasing attention in the fields of scientific research and industry, and its application fields cover new materials, semiconductors / microelectronics, petroleum / mining / geology, archaeology / cultural relics, biology / medicine, life sciences, food testing, space technology , military / defense and other fields. Therefore, the product has a huge potential market size. [0003] Due to the penetrating characteristics of x-rays, it is possible to measure the internal structure of complex parts. It just makes up for the inherent deficiency that traditional precision measuring instruments such as three-coordinate measuring machines can only measure external dimensions. [0004] figure 1 Schematic diagram of x-ray sca...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/04
Inventor 须颖董友
Owner 天津三英精密仪器股份有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products