Metering type high-precision x-ray microscope sample scanning table
A technology of X-ray and sample stage, which is applied in the field of metrology high-precision X-ray microscope scanning sample stage, which can solve the problems of imaging error, precision error, sample position offset, etc.
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[0017] The present invention will be described in detail below in conjunction with specific embodiments.
[0018] refer to Figure 2 ~ Figure 4 The scanning turntable 2 is installed on the fixed base 1, and the upper part of the scanning turntable 2 is fixedly installed with a three-dimensional positioning platform 6. The three-dimensional positioning platform includes three platforms that can move freely along the x, y, and z directions respectively. During operation, the z-direction platform can move along the guide rail fixedly installed on the scanning turntable 2, the x-direction platform can move along the guide rail fixedly installed on the z-direction platform, and the y-direction platform can move along the guide rail fixedly installed on the x-direction platform. By adjusting the positions of the three platforms, the precise positioning of the sample scanning position in three directions can be realized. The sensor mounting seat 3 is installed on the outside of the ...
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