Metering type high-precision x-ray microscope sample scanning table

Abstract

The invention discloses a metering type high-precision x-ray microscope sample scanning table. A scanning rotary table (2) is arranged on a fixed base (1) and is used for providing rotary scanning motion needed by a scanned sample; a three-dimensional positioning platform (6) is fixedly arranged on the upper part of the scanning rotary table (6); a sensor installation seat (3) is arranged outside the fixed base (1); a radial run-out error measuring sensor (4) and an axial run-out error and swing error measuring sensor group (5) are respectively arranged on the sensor installation seat (3); a sample strand (8) is fixed above a y-direction platform. The metering type high-precision x-ray microscope sample scanning table can achieve real-time measuring of radial errors, axial errors, and swing error of a rotary shaft in a rotary process of the sample scanning table; a measured error result can be used for carrying out error correction on the motion of the sample, so that the difficulty of three-dimensional image reconstructing distortion caused by precision error of the sample scanning table can be solved.

Description

technical field [0001] The invention belongs to the technical field of micro-CT scanning imaging, in particular to a measurement-type high-precision X-ray microscope scanning sample stage. Background technique [0002] In recent years, micro-CT technology has received increasing attention in the fields of scientific research and industry, and its application fields cover new materials, semiconductors / microelectronics, petroleum / mining / geology, archaeology / cultural relics, biology / medicine, life sciences, food testing, space technology , military / defense and other fields. Therefore, the product has a huge potential market size. [0003] Due to the penetrating characteristics of x-rays, it is possible to measure the internal structure of complex parts. It just makes up for the inherent deficiency that traditional precision measuring instruments such as three-coordinate measuring machines can only measure external dimensions. [0004] figure 1 Schematic diagram of x-ray sca...

AI Technical Summary

Problems solved by technology

The accuracy error of the CT scanning sample stage is mainly produced by the key parts during its processing and assembly process, resulting in radial runout, axial runout and axis swing of the observation center of the sample during the scanning process, and the position error of the rotating shaft during the rotation of the turntable will be Causes a shift in sample position, which in turn leads to imaging errors

The accuracy of the general-purpose scanning sample stage is generally difficult to meet the needs of high-resolution imaging, so that there is a certain distortion between the scanning result and the actual structure of the scanned object. Therefore, it is necessary to measure and correct the runout and swing errors of the scanning stage rotation axis

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