Measuring method based on two-cross-section radial difference and gradient extraction main shaft gyration accuracy

Abstract

A Measuring method based on two-cross-section radial difference and gradient extraction ultra-precision main shaft gyration accuracy belongs to the technical field of ultra-precision measurement and ultra-precision machining, the method comprises a ultra-precision main shaft or rotary platform axial gyration accuracy method based on gradient extraction and an angle gyration accuracy measurement method based on the radial error of two cross sections ; the method comprises the following steps: carrying out a secondary radial gyration accuracy measurement on a certain cross section of a roundness standard device based on the least square method, obtaining angle gyration accuracy of a shafting to be measured through the secondary radial error and revolution angle geometric relationships; extracting the gradient which the plane optical flat center is relative to the shafting to be measured based on a least-squares circle evaluation method, automatically segregating the tilt error in the axial gyration accuracy measurement; the measuring method of the invention can effectively eliminate the error source existing in the angle gyration accuracy and axial gyration measuring process, thus greatly improving measuring accuracy of the gyration accuracy of the ultra-precision spindle and the rotary platform.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision measurement and ultra-precision machining, and mainly relates to a method for measuring the rotation accuracy of an ultra-precision spindle or turntable based on the extraction of radial difference and inclination of two sections. Background technique [0002] In the field of ultra-precision metrology testing and ultra-precision machining, the function of ultra-precision spindle or single / multi-axis turntable with high rotational accuracy is to provide high-precision rotational reference, and it is an indispensable key unit for ultra-precision instruments and equipment. Ultra-precision spindles or single / multi-axis turntables are widely used, such as: axis space position calibration, centering and mechanism installation of satellite cameras; engine coaxiality detection and inertial navigation equipment testing and calibration, etc. With the gradual increase in the precision requirements of...

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Problems solved by technology

At present, the measurement method of the axial rotation accuracy is similar to the measurement method of the radial rotation accuracy, which is also measured by the roundness standard, but the rotation axis cannot be accurately found, and the tilt error introduced by the measured surface has reached or exceeded the axial rotation accuracy. , so the measurement accuracy is not high; the measurement method of angular rotation accuracy in "GJB1801-93 Main Performance Test Methods of Inertial Technology Test Equipment" is currently a more effective angular rotation measurement method. This method uses phot

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