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XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic

A technology of precision motion, piezoelectric ceramics, applied in the manufacture of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of easy vibration, low system stiffness, etc., to improve the stiffness of the mechanism, the overall structure is simple, and the size of the structure small effect

Inactive Publication Date: 2012-10-10
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. The mover coil assembly of the linear motor generally protrudes from the linear motor housing in the form of a cantilever beam, and the kinematic connection mechanism generally adopts two sets of roller guide rails with a cantilever beam for sliding connection. This structure itself is prone to vibration vibration, resulting in low system stiffness;

Method used

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  • XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic
  • XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic
  • XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic

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Embodiment Construction

[0035] The present invention will be further described in conjunction with accompanying drawing:

[0036] Referring to the accompanying drawings, the XY precision motion platform for piezoelectric ceramic vibration suppression of the present invention includes: a base plate assembly 1, an X-axis linear motor assembly 2, a Y-axis linear motor assembly 3, a motion connector assembly 4, a base plate 5, and an X-axis Angle frame mounting screw for grating ruler reading head 6, angle frame for X-axis grating ruler reading head 7, X-axis grating ruler reading head 8, mounting screw for X-axis grating ruler reading head 9, X-axis precision motion rail fixing rail mounting screw 10, X-axis precision Motion guide rail 11, X-axis precision motion guide rail sliding rail mounting screw 12, X-axis linear motor mounting seat 13, X-axis linear motor mounting seat screw 14, X-axis mover piezoelectric ceramic film 15, X-axis linear motor mover assembly 16 , X-axis linear motor stator and hous...

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Abstract

The invention provides a XY precision motion platform capable of suppressing vibration by utilizing a piezoelectric ceramic. An X-axis linear motor component (2), a Y-axis linear motor component (3) and a motion connector component (4) are installed on a baseplate (5), X-axis mover piezoelectric ceramic films (15) are arranged on the upper surface and the lower surface of an X-axis linear motor mover (16) of the X-axis linear motor component (2) respectively, and Y-axis mover piezoelectric ceramic films (20) are arranged on the upper surface and the lower surface of a Y-axis linear motor mover (21) of the Y-axis linear motor component (3) respectively. The XY precision motion platform of the invention has a rapid response to mechanism vibration of a linear motor mover and can eliminate or reduce the mechanism vibration of the linear motor mover intelligently, so that the mechanism rigidity is improved. Moreover, the XY precision motion platform has advantages of light weight, small size, etc., and is suitable for high-speed packaging operations of semiconductor integrated chips carried out in a small space, such as a production line and the like.

Description

technical field [0001] The invention relates to semiconductor chip packaging equipment, in particular to an XY precision motion platform which responds quickly to the vibration of a linear motor mover and reduces it in an intelligent way compared with a traditional XY motion platform, and is suitable for production High-speed packaging of semiconductor integrated chips in narrow spaces such as assembly lines. Background technique [0002] In the XY motion platform, the weakest and most prone to mechanism vibration is the mover coil assembly of the linear motor. This is because: [0003] 1. The mover coil assembly of the linear motor generally protrudes from the linear motor housing in the form of a cantilever beam, and the kinematic connection mechanism generally adopts two sets of roller guide rails with a cantilever beam for sliding connection. This structure itself is prone to vibration vibration, resulting in low system stiffness; [0004] 2. The driving current passe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
Inventor 刘延杰宋磊刘扭扭
Owner HARBIN INST OF TECH
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