Micro-nano simulation rotating drive device

A rotary drive device and micro-nano technology, applied in the field of precision and ultra-precision machining, can solve the problems of low round-trip repeat positioning accuracy, low stepping accuracy, large structure size, etc., and achieve novel structure, improved driving accuracy, and large load output. Effect

Inactive Publication Date: 2012-10-10
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the past, the driving device often had disadvantages such as large structural size, low stepping accuracy, low reciprocating repeat positioning accuracy, and difficult processing.

Method used

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  • Micro-nano simulation rotating drive device
  • Micro-nano simulation rotating drive device
  • Micro-nano simulation rotating drive device

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Experimental program
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Embodiment Construction

[0020] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

[0021] see Figure 1 to Figure 3 As shown, the micro-nano bionic rotary drive device of the present invention includes a stator 2 and a rotor 4, the output end of the rotor 4 is provided with a threaded hole for linking, and the central hole of the stator 2 is transitionally fitted with the rotor 4; The interior of the stator 2 is packaged with driving piezoelectric stacks I, II1, 5 and clamping piezoelectric stacks I, II3, 6; among them, the driving piezoelectric stack I1 and the driving piezoelectric stack II5 are used to drive the stator 2 respectively. The packaged driving amplification mechanism; clamping piezoelectric stack I3 and clamping piezoelectric stack II6 are respectively used to drive the linear flexible hinge packaged in the stator 2 .

[0022] The rotor 4 is a non-winding structure.

[0023] The...

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Abstract

The invention relates to a micro-nano simulation rotating drive device, which belongs to the precise and super-precise machining field. The micro-nano simulation rotating drive device mainly consists of a stator and a rotor, wherein a drive piezoelectric stack is encapsulated inside the stator; and the rotor is a variable-type interface shaft. A high-precision piezoelectric drive device is used for driving a lever amplification flexible hinge structure to perform associated clamping, and the stepper super-precision rotation movement for the rotor to rotate along a fixed shaft is realized by controlling the clamping sequence of a piezoelectric clamping mechanism in the stator. The micro-nano simulation rotating drive device can be used for the high-precision drive and machining field, and has advantages of less investment, low cost, fast effect, high benefit and the like. The micro-nano simulation rotating drive device is a piezoelectric single-degree-of-freedom precision rotating drive device which can improve the system micro precision and reduce the structural size and can make super-precision stepper rotation movement along a determined direction.

Description

[0001] technical field [0002] The invention relates to the field of precision and ultra-precision machining, in particular to a micro-nano bionic rotary drive device. It can be used in fields such as precision machining machine tools, micro-electromechanical systems and robots. Background technique [0003] With the development of modern science and technology, the field of human research has expanded to the microscopic world, and the rapid development of disciplines such as microelectronics, life sciences, medicine and health, biochemistry, semiconductors, optics, data storage, ultra-precision machinery and its manufacturing, and precision measurement , people have more and more demand for micro-nano-level precision positioning technology and micro-nano-level precision driving technology. The traditional macroscopic large-scale driving device can no longer meet its precision requirements. Therefore, a new type of high-precision driving device with superior performan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/10H02N2/12
Inventor 赵宏伟李建平任露泉傅璐曲涵黄虎史成利刘丕新张攀峰其他发明人请求不公开姓名
Owner JILIN UNIV
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