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Vibration circuit

An oscillating circuit and electrode technology, used in power oscillators, electrical components, amplifiers with semiconductor devices/discharge tubes, etc., can solve the problems of frequency instability, frequency drift, and easy distortion, and achieve the effect of suppressing frequency drift.

Inactive Publication Date: 2012-10-24
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Compared with crystal oscillators and ceramic oscillators, MEMS oscillators are prone to distortion in pass characteristics when a signal with high power is input as an input signal
If the pass characteristics are distorted, it is easy to cause frequency drift (frequency instability)

Method used

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Embodiment Construction

[0034] Hereinafter, preferred embodiments of the present invention will be described in detail using the drawings. However, the embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential configuration requirements of the present invention.

[0035] 1. The oscillation circuit of the first embodiment

[0036] figure 1 It is a circuit diagram showing the oscillation circuit 1 of the first embodiment.

[0037] The oscillation circuit 1 according to the first embodiment includes: a MEMS vibrator 10 having a first electrode 11 and a second electrode 12 disposed with a gap therebetween; an amplifying section 20 including a gain section 22 and a gain limiting section 24. There is a first input terminal 221 and a first output terminal 222, and the gain is greater than 1, the gain limiting unit 24 has a second input terminal 241 and a second output terminal 242...

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Abstract

A vibration circuit includes: a micro electro mechanical systems (MEMS) vibrator which includes a first electrode and a second electrode which are arranged with a gap therebetween; an amplification section which includes a gain section which has a first input terminal and a first output terminal and of which gain is greater than 1, and a gain restriction section which includes a second input terminal and a second output terminal and of which the gain is less than 1; and an output terminal which is connected to the first output terminal, wherein the first electrode is connected to the first input terminal, wherein the first output terminal is connected to the second input terminal, and wherein the second output terminal is connected to the second electrode.

Description

technical field [0001] The present invention relates to oscillator circuits. Background technique [0002] MEMS (Micro Electro Mechanical Systems: Micro Electro Mechanical Systems) is a type of fine structure formation technology, for example, refers to the technology of manufacturing micron order fine electro mechanical systems and its products. Vibration elements (MEMS oscillators) made using MEMS technology are being developed. In addition, oscillation circuits using MEMS vibrators are also being developed. Patent Document 1 discloses an oscillator using a MEMS vibrator. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2009-200888 [0004] Compared with crystal resonators and ceramic resonators, MEMS resonators tend to be distorted in pass characteristics when a signal with high power is input as an input signal. If the pass characteristic is distorted, a phenomenon of frequency drift (frequency instability) is likely to occur. Contents of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03B5/30
CPCH03H9/02433H03H9/2457H03F3/3022H03B5/30H03F2200/408
Inventor 渡边彻
Owner SEIKO EPSON CORP