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Method for growing large-size high-temperature oxide crystal through for top-seeded temperature gradient technique

A high-temperature oxide and seed temperature technology, applied in the direction of single crystal growth, crystal growth, single crystal growth, etc., can solve the problems of unfavorable impurity removal, difficult observation, complicated process, etc., to prevent parasitic nucleation and eliminate crystals. Defects, the effect of reducing dislocation density

Active Publication Date: 2015-05-27
UNIONLIGHT TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011]2. Due to the large gradient, the growth interface is excessively raised, the thermal stress is large, and the dislocation value increase causes the dislocation density to be too large, and the single crystal property is not good;
[0012]3. Large temperature gradient and high energy consumption
[0019] 1. The requirements for equipment are high, the whole process is complex, the crystal growth period is long, a large amount of helium is required as a coolant, and the cost is high
[0020]2. The temperature gradient distribution is opposite to the gravity field, which is not conducive to the removal of impurities;
[0021] 3. The crystal is in contact with the crucible, the stress of the crystal is large, and it is easy to parasitize and nucleate to cause polycrystal;
[0022]4. Crystal growth cannot be controlled and observed in real time;
[0023]5. The growth interface is too convex, with large thermal stress and dislocation
[0032]1. It is not suitable for materials with negative expansion coefficient, and materials with liquid density greater than solid density;
[0033]2. Due to the action of the crucible, it is easy to form stress, parasitic nucleation and pollution;
[0034]3. Not easy to observe;
[0035]4. There is mechanical disturbance in the descending mechanism
[0042]1. The temperature gradient distribution is opposite to the gravity field, which is not conducive to the removal of impurities;
[0043] 2. The crystal is in contact with the crucible, the stress of the crystal is large, and it is easy to parasitize and nucleate to cause polycrystal;
[0044]3. Crystal growth cannot be controlled and observed in real time;
[0045]4. The growth interface is too convex, with large thermal stress and dislocation
[0047] In the existing crystal growth methods, there is no method that can artificially control the crystal growth interface in real time according to the different stages of crystal growth

Method used

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Embodiment Construction

[0069] The present invention will be further described below in conjunction with specific examples.

[0070] A method for growing large-sized high-temperature oxide crystals by a top seed crystal temperature gradient method of the present invention comprises the following steps:

[0071] a. Put the raw materials into the crucible of the multi-chamber crystal furnace, fix the seed crystal on the bottom end of the seed rod lifting and rotating mechanism of the seed crystal rod, the lifting and rotating mechanism of the seed crystal rod is connected with the weighing mechanism, and cover with multiple The lid of the chamber crystal furnace, pumping the inside of the multi-chamber crystal furnace into 1.0×10 -3 ~1.0×10 -4 After Pa, the heating element is energized and heated at a rate of 4500~5000W / h until the raw material in the crucible melts into a melt;

[0072] b. After the raw material is melted, gradually reduce the power of the heating element at a rate of 300~500W / h so ...

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Abstract

The invention discloses a method for growing large-size high-temperature oxide crystal through a top-seeded temperature gradient technique. The method comprises steps of placing raw materials in a crucible of a multi-chamber crystal furnace, fixing seed crystal on a bottom end portion of a seed crystal rod of a seed crystal lifting rotary mechanism, and melting raw materials in the crucible to form a melting liquid; gradually reducing the heating power, enabling the melting liquid temperature to be a little higher than a melting point and trend to be stable, and observing the cold point position of the melting; washing the seed crystal; moving a cold point to the central position of the seed crystal; completely coinciding the central line of the seed crystal after being washed with the cold point of the melting liquid and keeping a constant temperature; seeding; necking down; shouldering; performing an equal-diameter process; and performing in situ annealing. Accordingly, a Kyropoulos method, a Czochralski method, a heat exchanging method, a temperature gradient technique and a Bridgman method are combined together, and the large-size high-temperature oxide crystal is produced.

Description

technical field [0001] The invention discloses a method for growing high-temperature oxide crystals, in particular a method for growing large-sized high-temperature oxide crystals by a top seed crystal temperature gradient method. Background technique [0002] At present, there are four main methods for growing high temperature oxide crystals: pulling method, heat exchange method, crucible descent method and temperature gradient method. [0003] 1. The pulling method was invented by Czochralski in 1918, so it is also called "Chuklarski method", or CZ method for short. It is a method of growing crystals by pulling the seed crystal from the melt. The most dominant method for single crystals. The molten material is contained in the heated crucible, and the seed rod is inserted into the melt from top to bottom with the seed crystal. Since the melt near the solid-liquid interface maintains a certain degree of supercooling, the melt crystallizes along the seed crystal, and then ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/16C30B11/00C30B15/00
Inventor 黄小卫柳祝平裴广庆
Owner UNIONLIGHT TECH
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