perpendicular magnetic recording media
A technology of perpendicular magnetic recording and magnetic recording layer, applied in magnetic recording, data recording, recording information storage, etc.
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Embodiment 1
[0040] As the non-magnetic substrate 10 , an Al substrate (S13 aluminum substrate manufactured by Fuji Electric Device Technology Co., Ltd.) having a smooth surface and subjected to Nip plating was prepared and cleaned. The cleaned non-magnetic substrate 10 is introduced into a DC magnetron sputtering device. Next, a Co54Fe9Ta6Zr target (consisting of 54at% Fe, 9at% Ta, 6at% Zr, and the remainder of Co on the basis of all atoms. The same applies hereinafter) was used to form a film with a thickness of 30nm in Ar gas at a pressure of 0.67Pa. Co54Fe9Ta6Zr amorphous soft magnetic backing layer 20. Next, a Ni20Cr2Si first base layer 30 with a film thickness of 6 nm was formed using a Ni20Cr2Si target in Ar gas at a pressure of 0.67 Pa. The obtained Ni20Cr2Si film has fcc structure. Next, in Ar gas at a pressure of 4.0 Pa, an Ru intermediate layer 40 with a film thickness of 8 nm was formed using a Ru target. Next, a Co26Cr2W second base layer 50 was formed using a Co26Cr2W targ...
Embodiment 2
[0042] A perpendicular magnetic recording medium was produced by the same procedure as in Example 1 except that the composition of the target was changed to Co38Cr2W when forming the second base layer 50 .
Embodiment 3
[0044] A perpendicular magnetic recording medium was produced by the same procedure as in Example 1 except that the composition of the target was changed to Co42Cr2W when forming the second base layer 50 .
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