Robot system

A robot system, a technology of a robot hand, applied in the field of robot systems, can solve problems such as inability to effectively unload wafers, not always able to effectively unload storage box wafers, etc.

Inactive Publication Date: 2012-11-14
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, conventional robotic systems suffer from the problem of not always being able to efficiently unload wafers stored in cassettes
[0005] For example, it is possible that a conventional robotic system cannot efficiently unload wafers because when an unloading unit is used to unload normally stored wafers from a storage cassette, the unloading unit may come into contact with wafers close to the unloaded wafers

Method used

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Embodiment Construction

[0022] A robot system according to an embodiment of the present invention will be described below with reference to the accompanying drawings. The present invention is not limited to the embodiments described below.

[0023] First, refer to figure 1 The robot system 1 according to the embodiment will be described. figure 1 is an explanatory diagram of the robot system 1 according to the first embodiment. To simplify the description, figure 1 The shapes of some components are schematically shown.

[0024] refer to figure 1 , the robot system 1 according to this embodiment includes a robot 10 and a controller 20 (see figure 2 ). The robot 10 includes an arm unit formed of a plurality of arms 11 . A hand 12 is provided at the tip portion of the arm 11 farthest from the robot 10 . A sensor 13 is provided at the tip portion of the hand 12 .

[0025] Each arm 11 is connected to the other arm 11 or hand 12 by joints 14a, 14b and 14c. Joints 14a, 14b and 14c, for example, r...

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Abstract

The present invention provides a robot system, including: a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction; a position detecting unit for detecting storage positions of the substrates stored within the storage unit; a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit; and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.

Description

technical field [0001] The present invention relates to robotic systems for handling substrates. Background technique [0002] Conventionally, there is known a robot system for carrying a substrate such as a semiconductor wafer or a glass substrate (hereinafter referred to as "wafer") accommodated in a storage case to a specific position. [0003] There has also been proposed a robot system in which the positions of individual wafers stored in cassettes in multiple levels are sensed by sensors to detect protruding wafers or wafers stored obliquely (see, for example, Japanese Patent Application Publication No. 2010 -219209). [0004] However, the conventional robot system suffers from the problem that it is not always possible to efficiently unload the wafers stored in the cassettes. [0005] For example, there is a possibility that a conventional robot system cannot efficiently unload wafers because when normally stored wafers are unloaded from a storage cassette by an unl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67265
Inventor 木村吉希
Owner YASKAWA DENKI KK
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