Robot system

A robot system, a technology of a robot hand, applied in the field of robot systems, can solve problems such as inability to effectively unload wafers, not always able to effectively unload storage box wafers, etc.
CN102779771AInactive Publication Date: 2012-11-14YASKAWA DENKI KK
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
YASKAWA DENKI KK
Publication Date
2012-11-14
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The present invention provides a robot system, including: a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction; a position detecting unit for detecting storage positions of the substrates stored within the storage unit; a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit; and an entry permission / prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.
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Description

technical field

[0001] The present invention relates to robotic systems for handling substrates. Background technique

[0002] Conventionally, there is known a robot system for carrying a substrate such as a semiconductor wafer or a glass substrate (hereinafter referred to as "wafer") accommodated in a storage case to a specific position.

[0003] There has also been proposed a robot system in which the positions of individual wafers stored in cassettes in multiple levels are sensed by sensors to detect protruding wafers or wafers stored obliquely (see, for example, Japanese Patent Application Publication No. 2010 -219209).

[0004] However, the conventional robot system suffers from the problem that it is not always possible to efficiently unload the wafers stored in the cassettes.

[0005] For example, there is a possibility that a conventional robot system cannot efficiently unload wafers because when normally stored wafers are unloaded from a storage cassette by an unl...

Claims

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