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A double-sided microlens array and its manufacturing method

A technology of microlens array and manufacturing method, which is applied in the direction of lens, microlithography exposure equipment, photoplate making process exposure device, etc., can solve the problems that the effective value cannot be obtained, the light cannot be effectively gathered, etc., and the angle of view can be increased Range, the effect of shortening the focal length

Active Publication Date: 2016-09-07
北京中科微投资管理有限责任公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0017] Through calculation, it can be found that when the maximum viewing angle is small, the light cannot be effectively gathered to the photosensitive absorption area, that is, the effective value cannot be obtained by solving equations (1) and (2)
[0018] When the size of the photosensitive element is too small, the effective value cannot be obtained by solving equations (1) and (2)

Method used

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  • A double-sided microlens array and its manufacturing method
  • A double-sided microlens array and its manufacturing method
  • A double-sided microlens array and its manufacturing method

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Embodiment 1

[0059] The invention proposes a double-sided microlens array to increase the viewing angle of the microlens array and shorten the focal length of the microlens array. Such as figure 2 As shown, the double-sided microlens array can specifically include: an array of double-sided microlenses 10, wherein each double-sided microlens 10 in the array includes an upper layer of micro-convex lenses 101 and a lower layer of micro-convex lenses 102; each double-sided micro-lens In 10, the upper-layer micro-convex lenses 101 and the lower-layer micro-convex lenses 102 are arranged in a one-to-one correspondence with the center, and the corresponding upper-layer micro-convex lenses 101 and the lower layer of micro-convex lenses 102 are bonded together.

[0060] In the embodiment of the present invention, by setting each microlens in the microlens array as a double-sided microlens including an upper layer of micro-convex lenses and a lower layer of micro-convex lenses, the incident light can...

Embodiment 2

[0068] In the embodiment of the present invention, the manufacturing method of the above-mentioned double-sided microlens array is shown, as Figure 7 As shown, the method may include the following processing steps:

[0069] Step 101, providing a substrate;

[0070] Step 102, etching a cavity array having the same width as the double-sided microlens on the substrate;

[0071] For simplicity, only one microlens in the double-sided microlens array is taken as an example, such as Figure 8 As shown, 801 is a substrate, usually silicon; 802 is a cavity with a uniform shape formed by etching on a silicon substrate;

[0072] Step 103, in each cavity, form the concave surface required for making the micro-convex lens in the lower layer by anisotropic etching; the concave surface is as follows Figure 8 as shown in 803;

[0073] Step 104, injecting the second material forming the lower layer of micro-convex lenses and the first material forming the upper layer of micro-convex lens...

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Abstract

The invention discloses a double-sided microlens array and a manufacturing method thereof. The double-sided microlens array comprises an array formed by double-sided microlens; each double-sided microlens in the array comprises an upper-layer micro convex lens and a lower-layer micro convex lens; the upper-layer micro convex lens and the lower-layer micro convex lens of each double-sided microlens are in the central one-to-one array form; and the upper-layer micro convex lenses and the lower-layer micro convex lenses are adhered together. According to the embodiment of the invention, the angel of field of the microlens array can be increased greatly, and the focal length of the microlens array can be shortened.

Description

technical field [0001] The invention relates to the technical field of optical device manufacturing, in particular to a double-sided microlens array and a manufacturing method thereof. Background technique [0002] The integration of microlens array (MLA, microlens array) and various devices to achieve light-gathering or imaging functions is a hot research direction of micro-optical systems in recent years. For the non-imaging microlens array, which mainly acts as a concentrator, how can all the incident light enter the photosensitive absorption region? From the perspective of geometrical optics, the fundamental basis for the design of energy-collecting microlenses is: after given the pixel size, the size of the photosensitive area of ​​the detector, the F number of the front optical system, the refractive index and wavelength of the lens material, and other parameters, find the Some structural parameters of a single microlens are obtained, so that the energy of the inciden...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G03F7/20
Inventor 闫建华欧文欧毅
Owner 北京中科微投资管理有限责任公司
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