Automatic-feed detection device for melt crystal solid and liquid interface position and detection method thereof

Abstract

The invention discloses an automatic-feed detection device for melt crystal solid and liquid interface position and a detection method thereof. As known to all, an insertion method at present depends on skills of operators and precision control effect of the insertion method is relevant to perception degree of the operators. The automatic-feed detection device is characterized in that a drive rod is mounted on a base, a slider moving vertically along with action of the drive rod is arranged on the drive rod, one side of the slider is connected with a support which is in linkage with the slider, a measuring rod is mounted on the support, the upper portion of the measuring rod is suspended on the support, a through hole is reserved at the bottom of the base, the lower portion of the measuring rod can penetrate through the through hole, a displacement sensor is in linkage with the support, and acquires data and generates corresponding signals to feed the signals to a controller controlling action of the drive rod when states of the position of the upper portion of the measuring rod and the support change. By the automatic-feed detection device for melt crystal solid and liquid interference position and the detection method thereof, melt crystal solid and liquid interface position can be detected automatically and measured accurately, and convenience in operation is achieved.

Description

technical field [0001] The invention relates to the field of crystal manufacturing, in particular to a self-feeding device for detecting the position of the solid-liquid interface of molten crystals and a detection method thereof. Background technique [0002] Various crystals and their corresponding preparation methods are produced to meet the needs of different industries. Although there are many kinds of crystals and their manufacturing methods are different, there are great commonalities in the basic crystal growth principles involved. [0003] At present, the methods for preparing crystals such as crystalline silicon and sapphire can be roughly divided into the Kyroplasty method (KY), the pulling method (CZ), the heat exchange method (HEM) and the improved methods derived therefrom. When preparing the above-mentioned high-quality crystals, it is hoped that the crystal preparation process can be precisely controlled, including important parameters such as melting rate, ...

AI Technical Summary

Problems solved by technology

The direct rod insertion method is simple and effective, but this method is very dependent on the skill of the operator, and is closely related to the degree of perception of the operator in terms of precision control, and there is a very large potential safety hazard, because most crystals are prepared in closed It is completed in a container, and there are strict requirements on the gas, pressure, and temperature in the furnace. The introduction of external rods and manual operation can easily lead to the failure of the seal and cause major accidents.

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