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Device and method for adjusting power uniformity of exposure surface of direct-writing exposure machine

A technology of exposure surface and uniformity, which is applied in the inspection field of printed circuit board equipment to achieve the effect of improving line width consistency

Active Publication Date: 2013-01-23
TIANJIN ADVANTOOLS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional projection exposure equipment usually needs more than ten steps because it needs to transfer the image from the film.

Method used

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  • Device and method for adjusting power uniformity of exposure surface of direct-writing exposure machine
  • Device and method for adjusting power uniformity of exposure surface of direct-writing exposure machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] A device for adjusting the power uniformity of the exposure surface of a direct writing exposure machine such as figure 1 As shown, it mainly includes three modules, namely lighting module, projection exposure module and power detection module. The lighting module includes exposure light source 1, optical lens group 3 and a reflector 2. The projection exposure module includes programmable graphic device 4 and projection lens 5, the power detection module includes a power probe 6 and a power display 7, the reflector 2 is obliquely arranged on the light path in front of the exposure light source 1, and the optical lens group 3 is arranged sequentially on the reflected light path of the reflector 2, and the pattern generation A device 4, a projection lens 5 and a power sensor 6 are sequentially arranged below the pattern generator 4, and the signal output end of the power sensor 6 is connected to a power display 7.

[0026] A method for adjusting the power uniformity of an...

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Abstract

The invention discloses a device and a method for adjusting power uniformity of an exposure surface of a direct-writing exposure machine. The device comprises an exposure light source, wherein a reflector is obliquely arranged on an optical path on the front side of the exposure light source, an optical lens group and a pattern generator are arranged on an optical reflection path of the reflector in sequence, a projection lens and a power probe are arranged below the pattern generator in sequence, and a signal output end of the power probe is connected with a power display; and a programmable pattern generator is divided into a plurality of small areas with same area, a white pattern is projected into each of the small areas, corresponding power values are tested, the power uniformity of the exposure surface of the direct-writing exposure machine can be acquired through calculation, and if the power uniformity of the exposure surface is unsatisfactory, the reflector in an illumination module can be adjusted for improvement. By adopting the device and the method, quality of an exposure pattern, in particular line width consistency of the exposure pattern, can be greatly improved.

Description

technical field [0001] The invention relates to the technical field of detection of printed circuit board equipment, in particular to a device and a method for adjusting the power uniformity of an exposure surface of a direct writing exposure machine. Background technique [0002] For the field of printed circuit board processing, especially in the manufacture of high-precision HDI boards and packaging substrates, the quality of the exposure pattern, especially the consistency of the line width of the exposure pattern is very important. [0003] At present, there are two types of exposure equipment for printed circuit boards: traditional projection exposure equipment and direct writing exposure equipment. The graphics of the traditional projection exposure equipment have been printed on the film negative, and the graphics are transferred to the photosensitive dry film through the projection film negative; the other type is the direct writing exposure equipment, and the light...

Claims

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Application Information

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IPC IPC(8): G03F7/20
Inventor 吴俊
Owner TIANJIN ADVANTOOLS