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Vacuum control system

A vacuum control and vacuum pump technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of energy consumption waste in the working gap, achieve the effects of improving suction efficiency, solving large space occupation, and reducing energy consumption

Active Publication Date: 2013-01-30
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

If a vacuum pump with a higher pumping speed is used, although it can meet the pumping speed requirements, its working gap is likely to cause waste of energy consumption

Method used

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Embodiment Construction

[0020] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.

[0021] figure 1 Shown is a schematic diagram of a vacuum control system according to an embodiment of the present invention. The vacuum control system includes a working chamber 1 , a vacuum pump 2 and an energy storage chamber 3 , all of which communicate with each other through conduits. The first isolation valve 4 is connected between the working chamber 1 and the vacuum pump 2; the second isolation valve 5 is connected between the energy storage chamber 3 and the working chamber 1; the third isolation valve 6 is connected between the energy storage chamber 3 an...

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Abstract

The invention discloses a vacuum control system which is suitable for semiconductor apparatus manufacture, wherein an energy storage cavity and a first isolating valve are connected between a working cavity and a vacuum pump in parallel; a second isolating valve is connected between the energy storage cavity and the working cavity; a second isolating valve is connected between the energy storage cavity and the vacuum pump; and a control unit is connected with the first isolating valve, the second isolating valve and the third isolating valve, and controls on and off states of the first isolating valve, the second isolating valve and the third isolating valve. According to the invention, the energy storage cavity reduces the initial pressure when the working cavity is vacuumized, therefore, the requirement of pumping speed of a smaller vacuum pump is met, and the problems of large occupation space and energy waste of a bigger vacuum pump in the prior art.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuits, in particular to a vacuum control system applied to the manufacture of semiconductor devices. Background technique [0002] With the rapid development of information technology, integrated circuits play an important role in daily life, and their demand has also increased significantly. People have higher and higher requirements for the integration of integrated circuits, which requires enterprises to continuously improve the processing capabilities of semiconductor devices. . Generally speaking, the processing technology of semiconductor devices must be applied to the vacuum system. As the demand for the quality of semiconductor products increases, the requirements for the degree of vacuum in the product manufacturing process are also getting higher and higher. Therefore, the structure of the vacuum system and Design has become an important factor in the manufacture of semiconduc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
Inventor 任大清
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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