Quartz crystal wafer corrosion machine

A quartz wafer and etching machine technology, which is applied in the field of quartz wafer etching machines, can solve problems such as low production efficiency and high labor intensity of workers, and achieve the effects of improving work efficiency, reducing labor intensity, and uniform corrosion

Inactive Publication Date: 2013-02-06
徐培炎
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the prior art, the wafer basket is held by hand and shaken manually for cleaning. This method is labor-intensive for workers and low in production efficiency.

Method used

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  • Quartz crystal wafer corrosion machine
  • Quartz crystal wafer corrosion machine

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Embodiment Construction

[0014] The specific technical solutions of the present invention will be further described below with reference to the accompanying drawings, so that those skilled in the art can further understand the present invention, without limiting their rights.

[0015] With reference to accompanying drawing, a kind of quartz wafer etching machine comprises box body 1, is provided with corrosive liquid pool 10 and cleaning pool 8 in box body 1, and corrosive liquid pool 10 is pickling pool, and cleaning pool 8 is washing pool, in corrosive liquid An automatic cleaning swing mechanism is provided on the table between the pool 10 and the cleaning pool 8. The automatic cleaning swing mechanism includes a support arm 12 connected to the cylinder and driven to lift it. The upper end of the support arm 12 is connected with a crossbeam 14 through a rotating shaft. 14 can rotate and swing back and forth above the corrosive liquid pool 10 and the cleaning pool 8. The front end of the crossbeam 14...

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Abstract

The invention discloses a quartz crystal wafer corrosion machine which comprises a box body, wherein the box body is internally provided with a corrosion liquid pool and a cleaning pool; an automatic cleaning swing mechanism is arranged on a table board between the corrosion liquid pool and the cleaning pool; the upper end of a support arm of the automatic cleaning swing mechanism is connected with a crossbeam through a rotating shaft; the front end of the crossbeam is connected with a cleaning frame for placing a wafer basket; the crossbeam is internally provided with a driving gear and a driven gear which are meshed with each other; the driving gear is connected with a driving motor output shaft on the crossbeam; the driven gear is connected with the cleaning frame; and a corrosion liquid spray head which is connected with the corrosion liquid pool and a cleaning liquid spray head which is connected with the cleaning pool are respectively arranged above the corrosion liquid pool and the cleaning pool. According to the quartz crystal wafer corrosion machine, the automatic cleaning swing mechanism is arranged, so that the cleaning frame is capable of driving the wafer basket to alternate between the corrosion liquid pool and the cleaning pool and automatically rotates 360 DEG, the cleaning and the corrosion are more even, the manual operation is replaced, the work efficiency is improved and the labor intensity of the workers is reduced.

Description

technical field [0001] The invention relates to a quartz wafer etching machine. Background technique [0002] The quartz wafer etching machine is used to etch the wafer. When in use, put the crystal wafer in the wafer basket, then put it in the etching solution pool, shake the wafer basket to etch the wafer, and then put the wafer basket in the cleaning pool , shake to wash. In the prior art, the wafer basket is held by hand and shaken manually for cleaning. This method is labor-intensive and the production efficiency is low. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a quartz wafer etching machine with reasonable structure, high production efficiency and no need for manual automatic operation in view of the deficiencies of the prior art. [0004] The technical problem to be solved by the present invention is achieved through the following technical solutions. The present invention is a quartz wafer etchi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C15/00
Inventor 徐培炎
Owner 徐培炎
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