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Cryogenic refrigerator, cryopump and displacer

A technology of ultra-low temperature refrigerators and displacers, which is applied in refrigerators, gas cycle refrigerators, refrigeration and liquefaction, etc., and can solve problems such as contact between displacers and cylinders, resin peeling, and reliability decline of ultra-low temperature refrigerators, so as to prevent Peeling, contact prevention effect

Active Publication Date: 2013-04-10
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Therefore, in the displacer coated with resin, the resin expands on the high temperature side, which may cause the displacer to come into contact with the cylinder
In addition, in order to avoid this phenomenon, it is conceivable to make the film thickness of the resin thinner, but if the film thickness of the resin becomes thinner, the resin is likely to peel off from the displacer, and there is a problem that the reliability of the cryogenic refrigerator is lowered.

Method used

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  • Cryogenic refrigerator, cryopump and displacer
  • Cryogenic refrigerator, cryopump and displacer
  • Cryogenic refrigerator, cryopump and displacer

Examples

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Embodiment Construction

[0022] Next, embodiments of the present invention will be described with reference to the drawings.

[0023] figure 1 A cryogenic refrigerator 1 as an embodiment of the present invention is shown, figure 2 A cryopump 2 as an embodiment of the present invention using the cryogenic refrigerator 1 is shown. In the present embodiment, a Gifford-McMahon type two-stage refrigerator will be described as an example of the cryogenic refrigerator 1 (hereinafter referred to as the GM refrigerator 1 ).

[0024] The GM refrigerator 1 has a compressor 10, a first-stage cylinder 11, a second-stage cylinder 12, a first-stage displacer 13, a second-stage displacer 14, a crank mechanism 15, a refrigerant gas flow path 16, and a cold storage material. 17. Cold storage material 18, first-stage cooling stage 19, second-stage cooling stage 20, first expansion chamber 21, second expansion chamber 22, etc.

[0025] The compressor 10 compresses helium gas as a refrigerant gas to generate high-pres...

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PUM

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Abstract

The invention provides a cryogenic refrigerator, a cryopump, and a displacer, higher reliability can be maintained regardless of change of temperature. The cryogenic refrigerator is a two-stage GM cryogenic refrigerator making a motor (M) driving the displacer (13, 14) rotatable in a direction opposite to a rotation direction in cooling and capable of reversion temperature increasing, the second-stage displacer (14) is formed by a displacer cylinder (14A) and a resin film (14B) formed at the outer periphery, and a thickness of the resin (14B) is thinner on the high-temperature side (H) than on the low-temperature side (L).

Description

technical field [0001] The invention relates to an ultra-low temperature refrigerator, a cryopump and a displacer in which resin is arranged on the surface of the displacer. Background technique [0002] For example, there is known a cryogenic refrigerator that uses a refrigerant gas such as helium and drives a displacer in a cylinder to expand the refrigerant gas in the cylinder to generate cold. In addition, as a cryogenic refrigerator, for example, a Gifford-McMahon (GM) type refrigerator is used. [0003] This GM-type cryogenic refrigerator can achieve a cryogenic temperature of about 10K by setting multiple stages. Therefore, the GM-type cryogenic refrigerator is often used as a cryopump or the like for vacuuming a vacuum container of a semiconductor manufacturing device or the like. [0004] Also, among GM-type cryogenic refrigerators, there is a cryogenic refrigerator in which resin is coated on the outer peripheral surface of the displacer in order to improve seali...

Claims

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Application Information

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IPC IPC(8): F25B9/14F04B37/08
CPCB01D8/00F25B9/14F04B37/08F25B9/10F25B2309/003
Inventor 许名尧
Owner SUMITOMO HEAVY IND LTD
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