Cryogenic refrigerator, cryopump and displacer
A technology of ultra-low temperature refrigerators and displacers, which is applied in refrigerators, gas cycle refrigerators, refrigeration and liquefaction, etc., and can solve problems such as contact between displacers and cylinders, resin peeling, and reliability decline of ultra-low temperature refrigerators, so as to prevent Peeling, contact prevention effect
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[0022] Next, embodiments of the present invention will be described with reference to the drawings.
[0023] figure 1 Shows an ultra-low temperature refrigerator 1 as an embodiment of the present invention, figure 2 The cryopump 2 which is an embodiment of the present invention using this ultra-low temperature refrigerator 1 is shown. In this embodiment, as the ultra-low temperature refrigerator 1, a Gifford-McMahon type two-stage refrigerator is used as an example for description (hereinafter referred to as GM refrigerator 1).
[0024] The GM refrigerator 1 has a compressor 10, a first-stage cylinder 11, a second-stage cylinder 12, a first-stage displacer 13, a second-stage displacer 14, a crank mechanism 15, a refrigerant gas flow path 16, and a cold storage material 17. Cold storage material 18, first-stage cooling stage 19, second-stage cooling stage 20, first expansion chamber 21, second expansion chamber 22, and the like.
[0025] The compressor 10 compresses helium as a refr...
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