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Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror

A high reflectivity, surface shape detection technology, applied in the field of optical detection, can solve problems such as affecting the measurement results, damage to the measurement piece, etc., to achieve the effect of simple operation and easy measurement

Active Publication Date: 2013-05-01
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology

It is a contact measurement method, which will cause damage to the measurement parts, thus affecting the measurement results

Method used

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  • Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror
  • Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror
  • Surface shape detection method for high-reflectivity concave-surface conical reflecting mirror

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with accompanying drawing and embodiment, but should not limit protection scope of the present invention with this.

[0023] see first figure 1 , figure 1 It is a principle diagram of the method for detecting the surface shape of the high-reflectivity concave conical mirror of the present invention. The structure of the embodiment of the present invention is as figure 2 As shown, its specific structure is as follows:

[0024] ① Make a partially transparent flat panel 2: paint the lower half of the front surface of the partially transparent flat panel 2 with black paint so that the light beam incident on it is absorbed; coat the lower half of the rear surface of the partially transparent flat panel 2 with reflective paint membrane;

[0025] ②In the direction of the parallel light beam output by the phase-shifting interferometer 1, the partially light-transmitting flat plate 2 and the concave conica...

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Abstract

The invention relates to a surface shape detection method for a high-reflectivity concave-surface conical reflecting mirror, and the method comprises the following steps of producing a partially-transmitting flat panel; sequentially arranging the partially-transmitting flat panel and the high-reflectivity concave-surface conical reflecting mirror to be detected in the direction of parallel beam outputted by a phase-shifting interferometer, wherein a conical surface of the high-reflectivity concave-surface conical reflecting mirror faces towards the light emitting direction of the phase-shifting interferometer; adjusting a light path; and utilizing the phase-shifting interferometer to detect interferometric fringes and obtain the surface shape information of the high-reflectivity concave-surface conical reflecting mirror. The surface shape detection method has the advantages of simplicity in operation, easiness in measurement and no damage on measuring elements.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a method for detecting the surface shape of a high-reflectivity concave conical mirror by using a phase-shifting interferometer. technical background [0002] Laser drilling technology is widely used in the aerospace field to realize the drilling process of small-diameter cooling holes, and the ring laser beam provides a new way for laser drilling technology. At the same time, the ring laser beam is also used in optical trapping and induction, laser processing and so on. This puts forward requirements for the realization of ring laser beams, and high reflectivity concave conical mirrors are often used to generate ring illumination beams. Therefore, it is necessary to accurately measure the surface shape of this high-reflectivity concave conical mirror. [0003] The known technology [1] utilizes a contact Taylor Hobson surface profilometer to measure the surface roughness of a c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 袁乔曾爱军张善华黄惠杰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD
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