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Control system and control method of electronic gun crucible positioning

A positioning control, electron gun technology, applied in sequence/logic controller program control, electrical program control, control using feedback, etc., can solve the problem of increased scrap rate, inability to find and deal with crucible cards, affecting production, etc. , to avoid production loss

Active Publication Date: 2015-07-15
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The conventional crucible positioning control system can only realize the crucible transposition operation according to the rotation in a single direction, and cannot detect and handle the crucible sticking event
When a stuck crucible event occurs, the current production process can only be stopped, and the vacuum chamber is opened to clean the crucible, which affects production and increases the scrap rate

Method used

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  • Control system and control method of electronic gun crucible positioning
  • Control system and control method of electronic gun crucible positioning
  • Control system and control method of electronic gun crucible positioning

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Embodiment Construction

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0029] Such as figure 1 As shown, a kind of electronic gun crucible positioning control system of the present invention comprises PLC, encoder, stepper motor (including driver), wherein: PLC is the main control component, and its input end receives encoder position signal and external crucible control signal, and output end Connect the motor driver to control the stepping motor; the encoder will be the detection device, responsible for feeding back the crucible position information to the PLC; the external crucible control signal is a switch control signal, used to select the crucible; the motor is a stepping motor, AC servo motor, AC The reduction motor drives the crucible to rotate.

[0030] An encoder is a device for measuring angular displacement, which can convert angular displacement into a periodic electrical signal (pulse). The number...

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Abstract

The invention relates to a control system and a control method of electronic gun crucible positioning, and belongs to the technical field of vacuum equipment. A conventional crucible positioning control system can only achieve transposition operations of a crucible according to rotation of a single direction, cannot find and deal with crucible blocking incidents, affects production and increases waste piece ratios. The control system of the electronic gun crucible positioning comprises a programmable logic controller (PLC), an encoder and a motor (including an actuator), monitors rotational status of the motor timely in the positioning process of the crucible, drives the motor to change directions and operate repeatedly so as to get rid of blocking status after crucible blocking is found, and achieves crucible bilateral positioning, crucible blocking detection and crucible blocking processing.

Description

technical field [0001] The invention belongs to the technical field of vacuum equipment, and in particular relates to an electron gun crucible positioning control system and a control method. Background technique [0002] The electron gun crucible needs to change the position of the crucible during the electron beam evaporation coating process. Occasionally, the crucible stuck (the crucible stuck during the movement) occurred when changing the position of the crucible during the production process. The conventional crucible positioning control system can only realize the crucible transposition operation by rotating in a single direction, and cannot detect and deal with the crucible sticking event. When the crucible gets stuck, the current production process can only be stopped, and the vacuum chamber is opened to clean the crucible, which affects production and increases the waste rate. Contents of the invention [0003] In view of the above-mentioned technical problems,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D3/12G05B19/05
Inventor 戚晖刘定文李重茂梁学慧
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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