Device and method of bus control of molecular pump

Abstract

The invention provides a device of bus control of a molecular pump. The device of the bus control of the molecular pump comprises a master control programmable logic controller, a communication module, a switching power supply, a bus cable, a monitoring computer and the molecular pump. The monitoring computer is connected with the master control programmable logic controller through an Ethernet. The communication module of the master control programmable logic controller is connected with the bus cable through the molecular pump. A bus protocol accords with a protocol of the master control programmable logic controller or is compatible with the protocol of the master control programmable logic controller, and can adopt a CONTROLNET protocol, a PROFIBUS protocol or a DEVICENET protocol. The device of the bus control of the molecular pump saves hundreds of control lines, and greatly reduces a failure rate of equipment. Due to the fact that a method of the bus control of the molecular pump is adopted, the device and the method of the bus control of the molecular pump avoid the problem of disturbance brought by the control lines when the control lines interlace in the equipment, increase reliability of the equipment, save a plurality of modules, thereby reducing cost of the equipment, are capable of reading various parameters of the molecular pump and alarming so as to participate in control, and are capable of greatly improving capacity of normal operation of the equipment.

Description

technical field [0001] The invention relates to a detection and control device and method for a photovoltaic conductive glass production line, in particular to a bus control device and method for a molecular pump on a solar thin film battery conductive glass magnetron sputtering device. Background technique [0002] Solar thin film battery conductive glass magnetron sputtering equipment production line is referred to as photovoltaic conductive glass production line. It can coat ordinary glass with a layer of conductive metal film. On this TCO glass film surface, PIN semiconductor film is coated and a back plate is installed to form a thin film solar cell. plate. The invention relates to the detection and control of molecular pumps in the production line. The molecular pump is installed on a certain cavity. It is a kind of high-speed rotation (20000 rpm) to transfer the impulse to the gas molecules, so that the gas molecules generate high force and run in a specific directio...

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Problems solved by technology

[0004] Chinese patent CN200810305976 relates to a bus control method of a crane feeding device, which is characterized in that: the method is to set a crane feeding device near the crane feeding device to control Box, and a bus module is provided in the control box of the crane feeding device, and the signal line on the crane feeding device and the crane is connected to the bus module in the control box of the crane feeding device to shorten the length of the signal line; The bus module compiles various signals into a bus signal according to the bus protocol of the main control programmable logic controller (PLC), and connects with the main control programmable logic controller (PLC) in a remote place through a bus cable, and the main control Control the programmable logic controller (PLC) to realize the feeding chain control of the crane feeding device and the crane, so as to solve the problem of many and long signal lines caused by long-distance transmission of multi-channel signal lines and difficult maintenance

The present invention overcomes the high failure rate of equipment caused by the existing molecular pump control method, the large cost of the control module, and the inconvenience of various dynamic parameters of the molecular pump being understood and mastered by the operator at any time, and provides a device that is easy to install and more reliable in control. A solution that keeps the device in check

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