Floating Conveyor

Abstract

PROBLEM TO BE SOLVED: To provide a floating conveying device which can respond to the change in floating environment accompanying the conveyance of substrates and can convey substrates at a constant floating height.SOLUTION: The floating conveying device includes: a floating stage 10 with a surface having an arranged plurality of jetting ports 11 and suction ports 12 in a direction of carrying a substrate W; a unit 30 for supplying suction force; main piping 13 communicating with the unit 30; branch piping 15 communicating with the main piping 13 and communicating with each suction port 12; and a differential pressure damper 20 disposed on the way to the main piping 13. The differential pressure damper 20 includes a manifold 21, which is a passage for communicating the main piping 13 and outside air, and a valve 22 for shutting the passage. The valve 22 opens and closes with an outer force executing on the valve 22 caused by the differential pressure of the main piping 13 and the outside air, and the opening degree changes by the movement of the valve 22 according to the change in the differential pressure to maintain a specific differential pressure.

Description

technical field [0001] The present invention relates to a floating conveyance device that blows out gas such as compressed air to convey a substrate in a floating state. Background technique [0002] A substrate coated with a resist solution (called a coated substrate) is used in a flat panel display such as a liquid crystal display or a plasma display. The coated substrate is formed by a coating device that uniformly coats a coating liquid such as a resist liquid or a chemical liquid on the substrate. [0003] Figure 13 A schematic diagram showing a coating device. The coating device 80 includes a transport device 81 for transporting the substrate W and a coating unit 82 for coating the coating liquid on the substrate. The coating section 82 includes a metal ferrule having a slit extending in a direction perpendicular to the conveying direction of the substrate W by the conveying device 81, and discharges the coating liquid from the slit while conveying the substrate W a...

AI Technical Summary

Problems solved by technology

[0006] However, in such Figure 14 In the floating conveyance device 91 shown, there is a problem that even if the power of the suction power supply device 94 that applies suction to each suction port 93 is a fixed value, the suction power varies depending on the position of the substrate W.

As a result, a phenomenon that the substrate W may be attracted to the floating conveyance device 91 or the end of the substrate W collides with the floating conveyance device 91 may occur.

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