Protective device and method of electric main shaft and thinning machine

Abstract

The invention provides a protective device and a method of an electric main shaft and a thinning machine. The protective device of the electric main shaft comprises a receiving module for receiving cooling liquid overflowing from a grinding cooling liquid inlet center hole of the electric main shaft, a sensing module for connecting with the receiving module and detecting voltage between two reserved detecting points of the receiving module and outputting voltage signals, a filter circuit module for conducting filtering on output voltage signals of the sensing module and outputting filtered voltage signals, an amplifying circuit for amplifying the filtered voltage signals and outputting amplified voltage signals, a comparing circuit module for outputting a first comparing result signal when the amplified voltage signals are smaller than a predetermined threshold value and a control module for controlling the electric main shaft to stop operating or to operate in a predetermined mode according to the first comparing result signal. The protective device of the electric main shaft has the advantages of preventing the grinding cooling liquid of the electric main shaft from entering an air bearing after overflowing, and protecting the electric main shaft against / from damage.

Description

technical field [0001] The invention relates to packaging equipment for integrated circuits, in particular to a protection device, method and thinning machine for an electric spindle. Background technique [0002] The thinning machine is a device that uses grinding wheels to grind the surface of the wafer, and is the most critical post-packaging device in the integrated circuit manufacturing process. The working mechanism of the thinning machine is powerful grinding, and the electric spindle is the executive part of the powerful grinding. The electric spindle is to directly install the stator and rotor of the motor into the interior of the spindle assembly, sometimes called a direct drive spindle (Direct Drive Spindle), which is a built-in motor spindle. [0003] In order to ensure the grinding quality of the wafer, the electric spindle is required to have high speed, high precision and high stability, and an aerostatic electric spindle is usually used. [0004] When the t...

AI Technical Summary

Problems solved by technology

The usual electric spindle does not have a liquid leakage protection device. If the small hole is blocked, the coolant will overflow into the air bearing along the grinding coolant inlet center hole, causing damage to the electric spindle and the thinning machine cannot work.

The inventors of the present invention found in the process of realizing the present invention that the thinning electromechanical spindle of the prior art does not take enough consideration of the leakage protection, and when the grinding coolant of the electric spindle overflows and enters the air bearing, if the system does not alarm and If the motorized spindle stops running, it will cause the motorized spindle to fail to work normally, and even cause the motorized spindle to lock up

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