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Comb electrode structure

A comb-shaped electrode and comb-shaped technology, applied in the field of comb-shaped electrode structure, can solve problems such as deformation, adsorption, and force imbalance.

Inactive Publication Date: 2013-07-03
TOUCH MICRO SYST TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, only one side of the outermost comb teeth generates electrostatic force, so the force is unbalanced
Once the electrostatic force is greater than the strength of the outermost comb-like teeth themselves, the outermost comb-like teeth will deform and approach or contact another comb-like tooth, and finally a pull-in phenomenon will occur, causing the comb-like electrode structure to short-circuit and fail

Method used

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  • Comb electrode structure
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Examples

Experimental program
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Effect test

no. 1 example

[0027] Please refer to figure 1 , Which shows a schematic diagram of a comb-shaped electrode structure according to an embodiment of the present invention. The comb-shaped electrode structure 100 includes a plurality of first comb-shaped teeth 112, a plurality of second comb-shaped teeth 114 and a first strengthening tooth 116. The first comb-shaped teeth 112 and the second comb-shaped teeth 114 are comb-shaped electrodes arranged periodically. The first comb-shaped teeth 112 and the second comb-shaped teeth 114 are staggered with each other, and the number is equal.

[0028] In this embodiment, the first comb teeth 112 are connected to each other by a cantilever beam 111, and the second comb teeth 114 are connected to each other by another cantilever beam 113, so that the first comb teeth 112 and the second comb teeth 114 is staggered between the two cantilever beams 111 and 113 and arranged at equal intervals.

[0029] The distance between the first comb teeth 112 and the secon...

no. 2 example

[0035] Please refer to image 3 , Which shows a schematic diagram of a comb-shaped electrode structure according to an embodiment of the present invention. The comb-shaped electrode structure 101 includes a plurality of first comb-shaped teeth 112, a plurality of second comb-shaped teeth 114, a first strengthening tooth 116 and a second strengthening tooth 118. The arrangement of the first comb-shaped teeth 112, the second comb-shaped teeth 114, and the first strengthening teeth 116 has been described in detail in the first embodiment, and will not be repeated here. The difference from the first embodiment is that the second strengthening tooth 118 is located on the outermost side of the second comb tooth 114 and can be electrically connected to the second comb tooth 114 through the cantilever beam 113. Such as image 3 As shown, the first strengthening tooth 116 is located on the far right side of the first comb tooth 112, and the second strengthening tooth 118 is located on t...

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Abstract

A comb electrode structure including a plurality of first comb fingers, a plurality of second comb fingers and a first reinforced comb finger is provided. The first comb fingers and the second comb fingers are interlaced with each other. The first reinforced comb finger is located at the outermost side of the first comb fingers, and electrically connected to the first comb fingers. In an embodiment, the width of the first reinforced comb finger is greater than that of the first comb fingers. In another embodiment, the thickness of the first reinforced comb finger is greater than that of the first comb fingers.

Description

Technical field [0001] The present invention relates to a microelectromechanical structure, and in particular to a comb-shaped electrode structure applied to a microelectromechanical device. Background technique [0002] The optical application of MEMS mirrors uses the mirror to vibrate at a special frequency under predetermined driving conditions to achieve the purpose of large-angle optical scanning. At present, many different types of microelectromechanical actuators have been proposed, and the comb-shaped electrode structure driven by electrostatic force is the most promising actuator. When an electrostatic attraction force is generated between the comb-shaped teeth in the comb-shaped electrode structure, the mirror can be rotated to the maximum inclination angle with the twisting member as the rotation axis. The comb-shaped teeth have the same electrostatic force on the left and right sides, and the force is balanced. However, only a single side of the outermost comb tooth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00B81B7/02
CPCB81B3/0045B81B2201/042B81B2203/0136B81B2203/058
Inventor 陈明发李柏勋
Owner TOUCH MICRO SYST TECH