Appearance inspection apparatus and execution method thereof

Abstract

The invention provides an appearance inspection apparatus and an execution method thereof. The appearance inspection apparatus comprises a plurality of image capturing units, a light source, a synchronization unit, an image analysis and judgment unit, a motor and a conveying unit. The image capturing units capture a plurality of surface images of a to-be-inspected integrated circuit; the light source provides needed light; the synchronization unit transmits the captured surface images to the image analysis and judgment unit synchronously; the image analysis and judgment unit determines whether the to-be-inspected integrated circuit has flaws or not according to the captured surface images; the motor receives control signals transmitted by the image analysis and judgment unit and drives the conveying unit to move according to the control signals. The surface images captured by the image capturing unit are transmitted to the image analysis and judgment unit synchronously, so that inspection time is shortened.

Description

Technical field [0001] The present invention relates to an inspection device, in particular to an appearance inspection (Final Visual Inspection, FVI) device and an execution method thereof. Background technique [0002] In the early days, the surface defects of integrated circuits were all manually inspected by manual visual inspection using a high magnification microscope. However, the speed of manual inspection is slow, and the quality of the operators is uneven. It is easy to miss the inspection, resulting in a high false detection rate and some defects. It is difficult to use manual detection, which makes manual detection methods inefficient. [0003] In order to improve the above-mentioned shortcomings of manual detection, the industry has developed a method of using machine detection. See figure 1 , figure 1 It is a block diagram of the existing appearance inspection device. The appearance inspection device mainly includes two image capturing units 100 and 102, two image a...

AI Technical Summary

Problems solved by technology

[0005] However, in the above-mentioned steps of machine inspection, two-way non-simultaneous communication is required when the imaging units 100 and 102 confirm whether each other has completed the inspection, so it takes a lot of time, and it also takes time for the image analysis unit 110 to notify the programmable logic controller 140 to complete the inspection. Communication time, resulting in a long communication time during the detection process, making the appearance inspection device inefficient

[0006] Therefore, it is necessary to propose a method to solve the problem of poor efficiency caused by the long communication time of the above-mentioned existing appearance inspection device

Images