A Quartz Tuning Fork Dual-Axis Micro Gyroscope
A quartz tuning fork, micro-gyroscope technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments and other directions, can solve the problems affecting the gyro measurement accuracy, the process is not easy to implement, the electrode layout is complicated, etc. Difficulty in production, guaranteeing achievability, suppressing the effect of mechanical coupling
Inactive Publication Date: 2015-08-19
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
However, the known single-chip quartz micro-gyroscope structure still has the following technical deficiencies: the electrode layout is relatively complicated, and the process is not easy to realize; there is a large cross-coupling between the two axes, which affects the measurement accuracy of the gyroscope.
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[0032]In order to better illustrate the purpose and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0033] The tuning fork structure of the invention is processed by a z-cut quartz wafer with a certain thickness through a wet etching process. image 3 It is a specific structure of the present invention, including: four driving fingers, four sensitive fingers, two beams, a hexagonal frame and a central fixed support structure. The first driving finger 110, the second driving finger 120, the third driving finger 130, the fourth driving finger 140, and the four sensitive fingers 310, 320, 410, 420 are evenly distributed in the hexagonal frame 501. On both sides, the first sensitive fork 310 and the second sensitive fork 320 are sensitive fork for z-axis detection, the third sensitive fork 410 and fourth sensitive fork 420 are sensitive fork for y-axis detection Refer to; t...
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The invention relates to a MEMS angular velocity sensor, and especially relates to a quartz tuning-fork-type biaxial micro-gyroscope. The invention belongs to the technical field of inertial measurement device. The biaxial micro-gyroscope provided by the invention is obtained by a wet-method etching processing process of z-direction-cut quartz wafer with a certain thickness. The biaxial micro-gyroscope specifically comprises four driving interdigitals, four sensitive interdigitals, a hexagonal framework, a left cross beam, a right cross beam, a central fixed supporting structure, a plurality of driving electrodes, a y-axis sensitive electrode, and a z-axis sensitive electrode. With the biaxial micro-gyroscope, angular velocities on the y-axis direction and the z-axis direction can be simultaneously measured. The driving interdigitals and the sensitive interdigitals are separated, such that cross-coupling between the axes is reduced, and gyroscope measuring precision is ensured. The y-axis sensitive electrode and the z-axis sensitive electrode are respectively arranged on different interdigitals, such that electrode manufacturing difficulty is reduced, and process feasibility is ensured. With the hexagonal framework, gyro error is reduced. With the central fixed supporting structure, gyro working stability is ensured.
Description
technical field [0001] The invention relates to a MEMS angular velocity sensor, in particular to a quartz tuning fork type dual-axis micro gyroscope, which belongs to the technical field of inertial measurement devices. Background technique [0002] Quartz micro gyroscope is a MEMS angular rate sensor, which is the core device of attitude control and inertial guidance. It has the advantages of small size, light weight and high reliability. With the development of microfabrication technology in recent years, the performance of quartz microgyroscope has been steadily improved, showing the characteristics of diversified structure, miniaturized volume, multi-axis measurement, and digital circuit. [0003] The quartz micro-gyroscope manufactured by the American CST company is the most mature. The typical structure of the gyroscope chip is an H-shaped structure, which is a y-axis sensitive gyroscope, such as figure 1 shown. The driving fingers and the sensitive fingers are respe...
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IPC IPC(8): G01C19/5621
Inventor 赵克王茜蒨冯立辉崔芳孙雨南
Owner BEIJING INSTITUTE OF TECHNOLOGYGY