A Method for Doubling the Spatial Frequency of a Grating
A technology of spatial frequency and grating, applied in the field of grating, can solve problems such as restricting popularization and application, and achieve the effect of simple manufacturing process, easy realization and low cost.
Active Publication Date: 2015-08-12
XIAMEN UNIV
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However, this method also has the following limitations: Since the light intensity distribution of the fractional Talbot image of the mask grating is sensitively dependent on the distance from the mask grating, the implementation of this method must use a high-precision control device to precisely position Record the dry plate, which limits the application of this method to a certain extent
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[0020] Please check figure 1 and figure 2 , a method for doubling the spatial frequency of a grating, comprising:
[0021] Step 1, preparing a recording dry plate 1 coated with a photoresist layer 2; among the present embodiment, the photoresist layer 2 is a positive photoresist layer; the photoresist For example, the CHP-C type photoresist produced by Beijing Raiseton Technology Development Co., Ltd. is selected.
[0022] Step 2, place the recording dry plate 1 in the interference light field of two symmetrically incident coherent parallel lights 4 and 5 for the first exposure, and obtain the fundamental frequency grating after development; in this embodiment, the two parallel beams The included angle between the light 4, 5 and the normal line 3 of the recording dry plate 1 is θ; where, 2sinθ=λ / d, the λ is the wavelength of the two beams of coherent parallel light 4, 5, and the d is the period of the fundamental frequency grating; The exposure time is related to the posit...
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The invention discloses a method for doubling the grating space frequency. The method comprises the following steps: 1, preparing a recording dry plate coated with a photoresist layer; 2, placing the recording dry plate in interference light fields of two beams of coherent parallel lights in symmetrical incidence to be subjected to first exposure, and obtaining a base-frequency grating after developing; and 3, placing the base-frequency grating in a light field of one beam of monochromatic parallel light in vertical incidence to be subjected to second exposure, and obtaining a doubled grating after developing. The method has the advantages as follows: single beam exposure and development are added as compared with a traditional interference lithography technology, without the need of special auxiliary devices, and the method has good compatibility with the traditional interference lithography technology, and has the technical effects as follows: simple manufacturing process, easy implementation and low cost.
Description
technical field [0001] The invention relates to the technical field of gratings, in particular to a method for doubling the spatial frequency of gratings. Background technique [0002] High-frequency gratings have extensive and practical applications in optics, electronics, biotechnology and other fields. Doubling the spatial frequency of gratings is an effective way to increase the spatial frequency of gratings. Many methods of doubling the spatial frequency of gratings have been proposed one after another, each of which has its own advantages and disadvantages. In contrast, the method of realizing grating spatial frequency frequency doubling by recording the fractional Talbot image of the mask grating (see US Patent 4360586) has many advantages and is relatively easy to implement. The method has advantages: no complex and high-cost preparation process is required, no special requirements are placed on the grating recording material and its base material, and the light sou...
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IPC IPC(8): G02B5/18G03F7/20
Inventor 李森森陈鹭剑董小鹏任雪畅刘守
Owner XIAMEN UNIV