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Method for rapidly evaluating reliability of semiconductor device

A semiconductor and reliability technology, applied in the direction of single semiconductor device testing, instruments, special data processing applications, etc., can solve the problems of monotonous degradation of device parameters, first rise and then fall, or first fall and then rise, etc.

Inactive Publication Date: 2013-08-14
BEIJING UNIV OF TECH
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Problems solved by technology

The degradation model is based on the principle of homogeneous reaction in kinetics, considering the concentration change law of the reaction quantity in the degradation process, and established according to the degradation law of the early and middle stages of the device. The problem of non-monotonic degenerate law such as rising after falling

Method used

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  • Method for rapidly evaluating reliability of semiconductor device
  • Method for rapidly evaluating reliability of semiconductor device
  • Method for rapidly evaluating reliability of semiconductor device

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Abstract

The invention relates to a method for rapidly evaluating reliability of a semiconductor device, and belongs to the technical field of reliability evaluation. The reliability of the semiconductor device is evaluated by the aid of a parameter degradation model of the semiconductor device, and the parameter degradation model is built based on the homogeneous reaction dynamic principle according to a concentration change rule of reacting dose in the degradation process. The method solves the problem of different degradation rules of semiconductor device parameters in experiments of monotonic degradation of degradation amount with the passage of time, and non-monotonic degradation such as rise and then drop, or drop and then rise. A long-term degradation rule of the device is rapidly extrapolated by the aid of the parameter degradation model, the reliability of the device is evaluated, and experimental time is shortened.

Description

technical field The invention relates to a method for quickly evaluating the reliability of semiconductor devices, belonging to the technical field of reliability evaluation. technical background What is the reliability level of the product? It is a problem that must be solved before the product can be used. Only by knowing the reliability level of the product life, failure rate, etc., can the product be applied accurately and appropriately. With the improvement of technology level and the adoption of new technologies, the reliability level of products is getting higher and higher. The higher the reliability level of the device, the longer it takes to evaluate the reliability level of the product such as life and failure rate. However, the continuous introduction of new products requires the shorter the time to evaluate the reliability level, the better. This makes the current evaluation methods unable to fully meet this requirement. In order to shorten the evaluation...

Claims

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Application Information

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IPC IPC(8): G06F17/50G01R31/26
Inventor 郭春生张燕峰冯士维万宁李睿朱慧
Owner BEIJING UNIV OF TECH
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