Constant-temperature liquid circulating device and temperature-controlling method

Abstract

The invention discloses a constant-temperature liquid circulating device which is used for conveying a constant-temperature liquid to an external device. The constant-temperature liquid circulating device comprises a refrigerating device unit, a circulating liquid loop unit and a controlling device. The refrigerating device comprises an electric three-way valve, an evaporation device, a condensing device, a compressor and an expansion device, the inlet end of the compressor is connected with one outlet end of the evaporation device, and the outlet end of the compressor is connected with the electric three-way valve; the circulating liquid loop unit comprises a temperature sensor, a frequency conversion device and a pump, the evaporation device is of a structure with three inlets and three outlets, the three inlets are respectively connected with the electric three-way valve, the expansion device and the external device, and the three outlets are respectively connected with the condensing device, the compressor and the pump. The controlling device is connected with the temperature sensor, the temperature sensor collects the temperature of the circulating liquid, and the controlling device is used for controlling the opening degree of the electric three-way valve according to the signal of the temperature sensor. The constant-temperature liquid circulating device is low in cost, small in size and capable of reducing system energy consumption.

Description

technical field [0001] The invention relates to a constant temperature liquid circulation device and a temperature control method, in particular to a constant temperature liquid circulation device and a temperature control method used in chip manufacturing plants. Background technique [0002] In today's society where the "low carbon" economy prevails, all walks of life are facing enormous pressure - "energy saving", especially the semiconductor industry. This also puts forward a higher design index for the temperature control device that provides a temperature control environment for the semiconductor industry: it can not only meet the temperature control range required by the process, but also achieve energy saving, environmental protection and economy while ensuring the normal operation of the device. Multiple indicators. [0003] Such as figure 1 Shown is the constant temperature liquid circulation device commonly used in dielectric film etching chip manufacturing plan...

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Problems solved by technology

[0005] 1. Under any working conditions, the temperature at the outlet of the three-way valve is 2-3°C lower than the set point temperature at the outlet of the water tank, so the refrigeration circuit needs to output more cooling capacity, and the power consumption of the compressor will increase. Increased machine power consumption;

[0006] 2. Regardless of whether the device is in the normal temperature control state or the temperature rise state, the heater in the water tank will output, and the power consumption of the whole machine will increase;

[0007] 3. According to the principle of energy balance, since the refrigeration circuit in this device needs to output more cooling capacity, the heat exchanged by the condenser will also increase, which will increase the volume of the condenser, which is not conducive to the miniaturization of the equipment

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