Pressure sensor chip
A pressure sensor and sensor technology, applied in the direction of measuring fluid pressure, instruments, and pressure difference measurement between multiple valves, to achieve the effect of ensuring pressure resistance and reducing stress
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Example Embodiment
[0043] [Embodiment 1]
[0044] figure 1 It is a schematic diagram of an embodiment (Embodiment 1) of the pressure sensor chip of the present invention. In this figure, and Picture 10 The same symbol indicates and reference Picture 10 The explained constituent elements are the same or equivalent constituent elements, and their explanation is omitted. In addition, in this embodiment, the pressure sensor chip is represented by the symbol 11A to distinguish it from Picture 10 The pressure sensor chip 11 shown.
[0045] In the pressure sensor chip 11A, in the area S1 where the peripheral portion 11-2c of the stopper member 11-2 and one surface of the sensor diaphragm 11-1 face each other, the area S1a on the outer peripheral side serves as a surface contact with the sensor diaphragm 11-1. In the joined joining area, the area S1b on the inner peripheral side serves as a non-joining area that is not joined to one surface of the sensor diaphragm 11-1. In addition, in the area S2 wher...
Example Embodiment
[0054] [Embodiment 2]
[0055] In the first embodiment, stopper members are provided on both sides of the sensor diaphragm 11-1. However, when the sensor diaphragm 11-1 has to be determined on the surface that bears the measurement pressure on the high pressure side, it may be only on the high pressure side. The surface on the opposite side of the pressure measurement surface (the surface receiving the measurement pressure on the low pressure side) is provided with a stopper member, and only the holding member is provided on the surface receiving the measurement pressure on the high pressure side. The structure of this pressure sensor chip is image 3 As shown in the second embodiment.
[0056] In the pressure sensor chip 11B, the measurement pressure Pb must be determined as the measurement pressure on the high pressure side, and a stopper member 11-2 is provided only on one surface of the sensor diaphragm 11-1 that receives the measurement pressure Pa on the low pressure side. O...
Example Embodiment
[0059] [Embodiment 3]
[0060] In the first embodiment, stopper members are provided on both sides of the sensor diaphragm 11-1, but the excessive pressure protection function on both sides of the sensor diaphragm 11-1 can also be removed, and only the retaining members are provided on both sides of the sensor diaphragm 11-1. member. The structure of this pressure sensor chip is Figure 4 As shown in the third embodiment.
[0061] In this pressure sensor chip 11C, a holding member 11-7 is provided on one surface of the sensor diaphragm 11-1, and a holding member 11-6 is provided on the other surface of the sensor diaphragm 11-1. That is, the recesses 11-6a, 11-7a of the holding members 11-6 and 11-7 do not have a curved surface along the displacement of the sensor diaphragm 11-1, and do not function as members for protecting against excessive pressure.
[0062] In addition, in the pressure sensor chip 11C, in the area S3 where the peripheral portion 11-6c of the holding member 11-6...
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