A high-frequency micro-displacement drive device and control method

Abstract

The invention discloses a high-frequency micro-displacement driving apparatus and belongs to the micro-displacement driver field. The driving apparatus comprises a housing and a voice coil motor, wherein the voice coil motor is arranged in the housing and comprises a stator and a rotor, and the rotor moves along an axial direction of the stator. A displacement sensor is arranged between the stator and the rotor, film pressing covers fixedly connected with the housing are mounted on two sides of the housing; the stator comprises magnet yoke and two magnets fixed on the magnet yoke; and the rotor comprises a central shaft, two coil supports fixedly connected with the central shaft, and two coils wound on the coil supports. An installation hole is disposed in a middle part of the film pressing cover. The central shaft penetrates the installation hole and is connected with a position-restricted shaft shoulder in a fastening manner by a stop nut. The apparatus provided by the invention has the advantages of high precision of output displacement, good linearity and high frequency characteristics, compact structure, good sealing performance, high integrated level and applicability of small-size micro-motion platforms.

Description

technical field [0001] The invention relates to the field of micro-displacement drives, in particular to a high-frequency micro-displacement drive device and a control method for the device to realize micro-displacement. Background technique [0002] Micro-displacement drive devices are widely used in technical fields such as optical instruments, microelectronics processing, and high-precision processing. For example, the tool device of the fast tool servo machining center is equipped with a micro-displacement drive device with fast response and high precision. [0003] Piezoelectric ceramic micro-displacement driver is a common micro-displacement drive device. For example, the Chinese Patent Application Publication No. CN10248325A discloses a large-load piezoelectric ceramic micro-displacement driver and its manufacturing method. The large-load piezoelectric ceramic micro-displacement driver includes an elastic diaphragm, an upper plate, a No. 1 piezoelectric component in ...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings of the existing micro-displacement drivers, such as response lag, easy creep and poor linearity, the technical problem to be solved by the present invention is to propose a high-frequency micro-displacement driver, which has high output displacement precision, linearity and high Good frequency characteristics, compact structure, good sealing, high integration, suitable for small volume micro-motion platform

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