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Minitype piezoelectric diaphragm pump

A micro-diaphragm pump and piezoelectric technology, applied in the fields of flow control and actuators, can solve the problems of adhesion and separation of diaphragm and piezoelectric bimorph, separation failure of piezoelectric bimorph and diaphragm, etc., to simplify installation and electrical connection , The flow design is controllable and the reliability is high.

Active Publication Date: 2013-10-23
CHONGQING ZHONGLEI SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Patent Document 1 adopts a cantilever beam support structure, the stress concentration of the piezoelectric bimorph is significantly smaller than that of a wafer or square bimorph, and the reliability of electrode connection is also significantly better than that of a wafer oscillator structure; but Patent Document 1 has diaphragms and piezoelectric bimorphs. The problem of bonding, fixing and separation of bimorphs is very easy to cause the separation failure of piezoelectric bimorphs and diaphragms

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0045] Embodiment 1 is a single-cavity piezoelectric micro-diaphragm pump composed of a single piezoelectric vibrator, such as Figure 1-15 shown. The piezoelectric miniature diaphragm pump is composed of base plate 1, piezoelectric vibrator 2, frame body 3, diaphragm 4, cover plate 5, discharge valve 6, and inlet valve 7 ( figure 1 , figure 2 ). The piezoelectric vibrator 2 is installed in the installation cavity formed by the bottom plate 1 and the frame body 3 , and the diaphragm 4 is placed on the upper part of the cantilever vibration part of the piezoelectric vibrator, forming a cavity 8 with the frame 3 and the cover plate 5 . The deformation of the diaphragm 3 is driven by the arched bending or warping deformation of the piezoelectric vibrator 2, which in turn causes the volume change of the pump cavity 8 to complete the process of entering and discharging the fluid.

[0046] The bottom plate 1 is formed of a resin material, and a rectangular recess 103 of the can...

Embodiment 2

[0056] This embodiment is a single-cavity piezoelectric diaphragm pump with multiple piezoelectric vibrators arranged side by side, and three piezoelectric vibrators are arranged side by side (referred to as 3×1×1 arrangement, the same below) as an example for illustration. Taking the piezoelectric vibrator in Embodiment 1 as the basic driving unit, and arranging multiple piezoelectric vibrators side by side, the volume of the cavity can be enlarged, the deformation of the cavity can be increased, and the delivery volume of the fluid can be increased. Compared with Example 1, the dimensions of the bottom plate, frame, diaphragm, and cover plate along the length direction of the piezoelectric vibrator remain unchanged, while the dimensions in the width direction increase according to the arrangement; the installation of the three piezoelectric vibrators leads to the installation and positioning structure of the bottom plate and the frame slightly different from a single piezoele...

Embodiment 3

[0060] This embodiment is a double piezoelectric vibrator single-cavity piezoelectric diaphragm pump with a structure of two opposing rows (1×2×1 array). Taking the piezoelectric vibrator in Embodiment 1 as the basic driving unit, two electric vibrators are arranged in opposite rows. Compared with Example 1, the size of the bottom plate, frame, diaphragm, and cover plate along the width direction of the piezoelectric vibrator remains unchanged, while the size of the length direction increases according to the arrangement; the installation of the two piezoelectric vibrators results in the installation and positioning structure of the bottom plate and the frame Unlike a single piezoelectric vibrator (see Figure 17 ).

[0061] The electrical connection of the piezoelectric vibrator can be realized by connecting both sides of the pump body. The driving voltage signals of the upper and lower piezoelectric bodies of the two piezoelectric vibrators are synchronized. For the changes...

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Abstract

A minitype piezoelectric diaphragm pump comprises a bottom plate, piezoelectric oscillators, a frame body, a diaphragm, a cover plate, a discharge valve and an inlet valve, wherein the diaphragm is separated from a pump cavity and the piezoelectric oscillator, and is driven through the bending deformation of the piezoelectric oscillator to complete the liquid conveying. The minitype piezoelectric diaphragm pump is characterized in that the piezoelectric oscillator is rectangular and adopts a cantilever fixing structure, a bottom plane of a cantilever vibration part of the piezoelectric oscillator is in contact with a mounting supporting plane on the bottom plate in a propping manner to form a supporting structure. The minitype piezoelectric diaphragm pump further comprises the structure that the bottom plane of the cantilever vibration part of the piezoelectric oscillator in non-drive state is in complete contact with the mounting supporting plane of the bottom plate, an embedded cantilever is fixed between the bottom plate and the frame body, the displacement size of the diaphragm is larger than the size of the cantilever vibration part of the piezoelectric oscillator, and the gap size between the diaphragm and the mounting supporting plane is smaller than or equal to the thickness size of the cantilever vibration part of the piezoelectric oscillator. The diaphragm pump has the characteristics of high reliability and flow design controllability.

Description

technical field [0001] The invention belongs to the technical fields of flow control and actuators, and in particular relates to a piezoelectric miniature diaphragm pump. Background technique [0002] With the development of electronic technology, the piezoelectric pump formed by the inverse piezoelectric effect of piezoelectric technology realizes the function of gas or liquid transportation. In general, a volume chamber cavity is formed between the flat piezoelectric vibrator and the housing of the piezoelectric pump, and the volume of the pump chamber is changed through the bending-tension vibration deformation of the piezoelectric vibrator to realize continuous negative pressure suction and pressurized discharge. [0003] Most of the existing piezoelectric pump technologies use a circular plate piezoelectric vibrator or a square plate piezoelectric vibrator. This kind of pump body needs to be fixed and supported around the circular plate or square plate to form a bowl-sh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04
Inventor 王素贞
Owner CHONGQING ZHONGLEI SCI & TECH
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