Semiconductor process monitoring method based on integrated leaning modeling technology

Abstract

The invention discloses a semiconductor process monitoring method based on the integrated leaning modeling technology. According to the semiconductor process monitoring method, on the basis that the vector data description algorithm is allowed, the integrated leaning modeling technology is introduced, and monitoring performance in a semiconductor process is promoted due to the fact that results of different models allowing vector data description are integrated. In an integrated leaning modeling process, a very important part is selection of appropriate integration strategies. As for the semiconductor process monitoring method, the different models allowing vector data description are integrated by adopting the advanced Bayesian reasoning strategy, and the advantages of all the models are used effectively. Finally, the semiconductor process is monitored by building a global statistic. Compared with a monitoring method based on a single model, the semiconductor process monitoring method based on the integrated leaning modeling technology greatly promotes the modeling performance of the models allowing vector data description and effectively improves the monitoring effect in the semiconductor process.

Description

technical field [0001] The invention belongs to the field of semiconductor industry process monitoring, in particular to a process monitoring method based on integrated learning modeling technology and support vector data description. Background technique [0002] Since the beginning of the 21st century, the monitoring of the production process of the semiconductor industry has attracted more and more attention from the industry and academia. This is because the process of the semiconductor industry itself has extremely high requirements on product quality. How to effectively prevent the process from producing inferior and unqualified products? The product is an urgent need to solve the problem. In addition, effective monitoring of the semiconductor process, the results obtained can in turn guide the improvement of the production process and production process. In addition to the method based on the mechanism model, the traditional semiconductor process monitoring methods m...

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Problems solved by technology

However, a single process monitoring model still cannot meet the monitoring requirements of the semiconductor industry in many cases

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