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Leakage search device

A leak detection and decompression device technology, applied in pump devices, measuring devices, by detecting the appearance of fluid at the leak point, etc., can solve problems such as damage to turbomolecular pumps

Active Publication Date: 2013-10-30
LEYBOLD HERAEUS GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is not possible to feed the test gas medium into the area between the gas friction pump and the turbomolecular pump during a cursory inspection, because feeding the test gas directly to the turbomolecular pump would cause a breakdown of the turbomolecular pump due to the large pressure difference. damage

Method used

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Experimental program
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Effect test

Embodiment Construction

[0023] In the exemplary embodiment shown, the high vacuum pump is a turbomolecular pump 10 , downstream of which in the transport direction two Holwick stages 11 (second and third stage) are arranged. The rotor 12 of the turbomolecular pump 10 is connected to a plurality of rotor elements 14 . The blade-shaped rotor elements 14 cooperate with stator elements 16 arranged between the rotor elements 14 . The stator element 16 is fixed in the pump housing 20 via a stator ring 18 . Gas transport takes place in the direction of the arrow 22 via the rotor blades 14 and the stator blades 16 . The Holwerk stage 11 connected to the turbomolecular pump 10 has a cylindrical rotor element 13 connected to a rotor element 12 which is arranged between threaded rails. The cylindrical rotor elements thus form the second and third pump stages 15 , 17 in combination with corresponding threaded tracks. The gas is thus first transported within the second stage 15 in the direction of the arrow 26...

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Abstract

A leakage search device has a backing pump connected to a test chamber (42) via a test gas line (48). Furthermore provided is a high-vacuum pump (10), at the inlet (36) of which a test gas detector (38) is arranged. The outlet (34) is connected to the backing pump (40). The test gas line (44) is connected, via a connecting line (48), to an intermediate region (50) arranged between the inlet (36) and the outlet (34) of the high-vacuum pump (10) for a non-detailed investigation of the object. A counter-flow path of the test gas, which extends from the intermediate region (50) to the inlet (36) is here shorter than the main flow path from the inlet (36) to the outlet (34) of the high-vacuum pump (10). Furthermore, a gas expansion device (44) for expanding the test gas to a pressure that is matched to the internal pressure level and suction capability of the high-vacuum pump (10) in the intermediate region (50) is arranged in the connecting line (48).

Description

technical field [0001] The invention relates to a leak detection device. Background technique [0002] Turbomolecular pumps employ a backflow leak detection device known, for example, from EP1585951 for leak finding. The object to be tested or the test chamber provided with the object to be tested is connected to the backing vacuum pump via a test gas line. Furthermore, the test gas line is connected to two or more intermediate inlets of the turbomolecular pump. The foreline vacuum pump is connected to the outlet of the turbomolecular pump. A test gas detector is arranged at the inlet of the turbomolecular pump, which is arranged in particular in a chamber evacuated by the turbomolecular pump. Thereby, a test gas detector with extremely high sensitivity can be used. The test gas is detected by causing a test gas, in particular helium, to flow within the turbomolecular pump towards the inlet against the main flow direction of the turbomolecular pump and to be able to dete...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20F04D19/04F04D25/16
CPCF04D19/046G01M3/205F04D19/044
Inventor 克里斯蒂安·拜尔罗伯特·施奈德斯萨沙·韦尔克
Owner LEYBOLD HERAEUS GMBH & CO KG