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Three-degree-of-freedom decoupling and modeling method for macro dynamic part of workpiece platform

A macro-moving part and modeling method technology, which is applied in the field of three-degree-of-freedom decoupling modeling of the macro-moving part of the lithography machine workpiece table, which can solve the problems of loose synchronous coupling of linear motor motion and other problems.

Active Publication Date: 2015-01-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the problem of the coupling between the X-direction motion model and the Y-direction motion model of the macro-motion part of the workpiece table caused by the non-strict synchronization of two groups of Y-direction linear motors in the macro-movement part of the lithography machine, and proposes a workpiece table Three-degree-of-freedom decoupling modeling method for macro motion

Method used

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  • Three-degree-of-freedom decoupling and modeling method for macro dynamic part of workpiece platform
  • Three-degree-of-freedom decoupling and modeling method for macro dynamic part of workpiece platform
  • Three-degree-of-freedom decoupling and modeling method for macro dynamic part of workpiece platform

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specific Embodiment approach 1

[0022] Specific implementation mode 1: The three-degree-of-freedom decoupling modeling method of the macro-movement part of the lithography machine workpiece table in this implementation mode is implemented according to the following steps:

[0023] 1. Calculate the positions of the masses 1 and 2 relative to the starting point O according to the three-degree-of-freedom decoupling modeling structure schematic diagram of the macro-movement part of the workpiece table;

[0024] 2. Deriving the speeds of mass block 1 and mass block 2 according to the positional relationship obtained in step 1:

[0025] v 1 = 0 y · v ...

specific Embodiment approach 2

[0036] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that the mass block 1 in step 1 includes the mover of the linear motor in the Y direction, the guide sleeve and the stator of the linear motor in the X direction, and the mass block 2 includes The mover and guide sleeve of the X-direction linear motor. Other steps and parameters are the same as those in Embodiment 1.

specific Embodiment approach 3

[0037] Specific embodiment 3: The difference between this embodiment and specific embodiment 1 or 2 is that the positions of mass block 1 and mass block 2 relative to the starting point O in step 1 are specifically:

[0038] x 1 = 0 y 1 = y x 2 = x · cos α + d · sin α y 2 = y + d · cos ...

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Abstract

The invention discloses a three-degree-of-freedom decoupling and modeling method for a macro dynamic part of a workpiece platform, in particular relates to a three-degree-of-freedom decoupling and modeling method for the macro dynamic part of a photoetching machine workpiece platform and aims to solve the problem of decoupling and modeling of two groups of Y-direction linear motors and a group of X-direction linear motor in the horizontal direction of the macro dynamic part of the photoetching machine workpiece platform. The method comprises the following steps of: 1, calculating positions of a mass block 1 and a mass block 2 which are relative to a start point O according to a three-degree-of-freedom decoupling and modeling structural schematic diagram of the macro dynamic part of the workpiece platform; 2, guiding out the speeds of the mass block 1 and the mass block 2 according to a position relation obtained in the step 1; 3, guiding out the total kinetic energy of a system according to a result obtained in the step 2; 4, obtaining an inertia matrix of the system according to a result obtained in the step 3; 5, guiding out a Coriolis matrix and a centrifugal force matrix according to a result obtained in the step 4; 6, guiding out relational expressions from the control force of the motor to coordinates x and y according to results obtained in the step 4 and the step 5. The three-degree-of-freedom decoupling and modeling method belongs to the field of ultra-precision manufacturing.

Description

technical field [0001] The invention belongs to the field of ultra-precision manufacturing, and mainly relates to a three-degree-of-freedom decoupling modeling method for the macro-movement part of a workpiece table of a photolithography machine. Background technique [0002] Lithography machine is the key equipment for manufacturing large-scale integrated circuits, mainly used in the development and production of integrated circuits, semiconductor components, optoelectronic devices, and optical devices. The workpiece table system is a key component of the lithography machine, which mainly realizes the multi-degree-of-freedom movement function of the lithography machine. The precision and speed of its movement directly affect the resolution and production efficiency of the lithography machine. The nanoscale ultra-high precision dynamic tracking and positioning of the workpiece table is the key technology for the development of lithography machines. Since long-stroke linear...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G05B19/18
Inventor 陈兴林王一光李晓杰
Owner HARBIN INST OF TECH