Dispatch method of wafer acceptance testing machine
A technology for testing machines and wafers, which is applied in semiconductor/solid-state device testing/measurement, data processing applications, resources, etc., and can solve problems such as error-prone, time-consuming and labor-intensive
Active Publication Date: 2016-01-27
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology
[0007] In view of the above-mentioned problems, the present invention discloses a method for dispatching workers for wafer acceptable testing machines. By setting the dispatching rules in the WAT area, the WAT machines can be automatically dispatched reasonably and effectively, so as to solve the above-mentioned manual dispatching. Time-consuming, labor-intensive and error-prone problems
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[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.
[0025] As an embodiment of the present invention, the dispatching method of the wafer acceptable test machine in this embodiment is applied to a host computer with a setting unit, an input sorting unit, a check calculation unit and an output unit, a dispatching system and On a transmission system, the products in this embodiment all refer to wafers, wherein the wafer acceptance test area where the wafer acceptance test machine is located includes an online monitoring test area and a final shipment test area, such as figure 1 shown, including the following steps:
[0026] Step 1, through the setting unit, set the dispatching rules for the online monitoring test area and the final shipment test area for each category of products.
[0027] Among them, the assignment rules for the online monitoring...
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The invention discloses a dispatching method of a wafer acceptance test machine. The method comprises the following steps of: step 1, setting dispatching rules; step 2, classifying and ordering, inspecting and calculating products in an Inline WAT area, dispatching by a dispatching system, and obtaining primary products; step 3, and transferring the primary products to a Final WAT area by a transfer system, carrying out secondary classification and ordering as well as secondary inspection and calculation, and carrying out secondary dispatching by the dispatching system. The dispatching method of the wafer acceptance test machine sets the dispatching rules, respectively defines the ordering of various kinds of products in the Inline WAT area and the Final WAT area, dispatches WAT machines according to the dispatching rules, and finishes the test procedures in the WAT areas timely and efficiently through inspection and calculation when arranging a batch of products to be tested each time; and the automated dispatching production of the unmanned WAT machines is realized, and the productivity of the WAT machines in the WAT areas can be maximized.
Description
technical field [0001] The invention relates to the technical field of automatic control of semiconductor production, in particular to a dispatching method for a wafer acceptance testing machine. Background technique [0002] In the current semiconductor foundry production, automation equipment is already very common. The production process equipment has been able to perform automatic film transfer, process processing, data recording, automatic judgment of whether the production wafer conforms to the process and other automated production. However, in OEM production, due to the complex and diverse product types and different technical processes, it is necessary to arrange the production sequence of the products on the machine. Arrange production. [0003] In the Wafer Acceptance Test (WAT) area in the Fab (factory) production area, a series of process stability monitoring and product design rule testing are mainly performed on the wafer. This test is currently mainly divide...
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IPC IPC(8): H01L21/66G06Q10/06
Inventor 沈晓栋周波邵雄娄晓祺
Owner SHANGHAI HUALI MICROELECTRONICS CORP