Silicon shell tungsten core heater strip and preparation method

A technology of heating wire and tungsten core, applied in the direction of heating element materials, gaseous chemical plating, coating, etc., can solve the problems of affecting service life, interfering with reaction growth conditions, and adverse effects of material preparation, so as to prevent sublimation and prolong use The effect of longevity

Inactive Publication Date: 2013-12-04
NORTH CHINA ELECTRIC POWER UNIV (BAODING)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the traditional tungsten wire is easy to sublimate and break under high vacuum and high temperature environment, which seriously affects its service life
In addition, the tungsten sublimated at high temperature will also interfere with the reaction growth conditions and adversely affect the material preparation

Method used

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  • Silicon shell tungsten core heater strip and preparation method

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Embodiment 1

[0020] The silicon shell tungsten core heating wire and the preparation method of the present invention are characterized in that they comprise the following steps:

[0021] Step 1: Wind the tungsten wire (0.7mm in diameter) into the desired shape and put it into the chemical vapor deposition reactor;

[0022] Step 2: Vacuumize the chemical vapor deposition reaction furnace to 3×10 -2 Pa;

[0023] Step 3: Introduce hydrogen into the chemical vapor deposition reaction furnace with a flow rate of 15L min -1 ;

[0024] Step 4: Heat the tungsten wire in the chemical vapor deposition reaction furnace to 1000°C and keep it;

[0025] Step 5: Feed trichlorosilane into the chemical vapor deposition reaction furnace with a flow rate of 30 sccm, trichlorosilane reacts with hydrogen (reaction time 10 minutes), and the reduced silicon is deposited on the surface of the heated tungsten wire to form a shell;

[0026] Step 6: Stop the trichlorosilane injection, slowly lower the temperatur...

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Abstract

The invention discloses a silicon shell tungsten core heater strip and a preparation method thereof, and belongs to the technical field of heating material preparation. High-purity silicon wraps the outer surface of a tungsten wire to form the heater strip. The preparation method includes the steps: winding the tungsten wire into a needed shape and placing the tungsten wire into a chemical vapor deposition reaction furnace; depositing the high-purity silicon on the surface of the tungsten wire through chemical vapor deposition reaction. The heater strip can be widely applied to various vacuum devices needing to be heated, and can stably and effectively provide heat sources for a system for along time.

Description

technical field [0001] The invention belongs to the technical field of heating material preparation, and in particular relates to a silicon shell tungsten core heating wire and a preparation method thereof. Background technique [0002] Temperature is an extremely important controlling factor in many physical and chemical reactions. The temperature directly determines whether many reactions can be successfully realized. The method of using hot wire heating to achieve a certain temperature requirement has been widely used in production practice. As a common heating wire, tungsten wire is relatively cheap, has the characteristics of high melting point and good stability, and has been widely used in semiconductor manufacturing, precision material preparation, electronic device production and other fields. However, traditional tungsten wires are prone to sublimation and breakage in high vacuum and high temperature environments, which seriously affects their service life. In add...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B3/12C23C16/24C23C16/46
Inventor 陈诺夫何海洋辛雅焜吴强弭辙白一鸣高征
Owner NORTH CHINA ELECTRIC POWER UNIV (BAODING)
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