Method and device for non-contact detection of curved prism

Abstract

The invention discloses a non-contact method and device for detecting a curved-surface prism. Firstly, after monochrome plane light is shot into the to-be-detected curved-surface prism, superposition of spherical waves and plane waves is formed; the propagation directions of wave surfaces are adjusted through a plane prism, and an aberration led by imaging of the to-be-detected curved-surface prism is calibrated through a calibrating mirror set; an image receiver receives an image undergoing calibrating processing, and the image the image receiver receives is a point diffusion image formed through diffraction; whether the to-be-detected curved-surface prism meets precision requirements is judged according to the image received by the imager receiver. According to the detection method, non-contact measurement is carried out, the processing surface of an element is not damaged, whether processing is qualified or not can be judged according to the image, and the method can serve as an effective mean of online quick and large-scale detection of Fery prisms.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a method and device for non-contact detection of curved prisms. Background technique [0002] At present, the means of separating monochromatic light from polychromatic light mainly include methods such as prism dispersion, grating diffraction, and interference filter, and the method of prism dispersion is widely used in various spectra due to its simple principle, stable performance, and mature processing. Instruments, such as spectrometers, spectrometers, spectrophotometers, etc., are widely used. Traditional dispersion prisms have flat front and rear surfaces, such as figure 1 Shown is a schematic diagram of the optical path of a traditional dispersive prism. The parameters that need to be accurately measured mainly include surface shape accuracy and edge angle. The surface shape accuracy can be measured with a Zygo interferometer, and the prism vertex angle that ...

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Problems solved by technology

[0005] However, due to the particularity of the dispersion angle and the center thickness of the curved prism, it cannot be measured by the method of measuring the apex angle of the traditional plane prism, nor can it be measured by the method of measuring the center thickness of the lens. There is a lack of detection of the curved prism in the prior art. effective means

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