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Vibrator element, electronic device, electronic apparatus, and method of manufacturing vibrator element

A manufacturing method and technology of vibrating sheet, which are applied in the parts of piezoelectric devices or electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve vibration instability, vibrating arm 1 Poor balance, etc.

Inactive Publication Date: 2013-12-18
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that the balance of the vibrating arm 1 is poor, and the vibration becomes unstable.

Method used

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  • Vibrator element, electronic device, electronic apparatus, and method of manufacturing vibrator element
  • Vibrator element, electronic device, electronic apparatus, and method of manufacturing vibrator element
  • Vibrator element, electronic device, electronic apparatus, and method of manufacturing vibrator element

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Experimental program
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Embodiment Construction

[0045] Embodiments of the vibrating piece, the electronic device, the electronic equipment, and the method for manufacturing the vibrating piece according to the present invention will be described in detail below with reference to the drawings.

[0046] figure 1It is a perspective view of a vibrating piece according to one embodiment of the present invention. As shown in the figure, the vibrating element 440 extends on a plane formed by the X axis (second axis) and the Y axis (first axis) perpendicular to the X axis in a planar shape, and has a mutual relationship between the front and the back. The first main surface 52 and the second main surface 54 . In addition, an axis perpendicular to the first main surface 52 and the second main surface 54 is set as the Z axis. In the vibrating plate 440 , the first vibrating arm 401 and the second vibrating arm 402 extend from the base 56 in the +Y axis direction, and the third vibrating arm 403 and the fourth vibrating arm 404 ext...

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PUM

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Abstract

The invention aims to provide a vibrator element, an electronic device, an electronic apparatus, and a method of manufacturing the vibrator element. During the manufacturing process of the vibrator element, both the profile and the groove sections of the vibrator element are etched to simplify the manufacturing process and improve the relative positional accuracy of both the groove sections and the profile of the vibrator element. The vibrator element (44) includes a base section, and a vibrating arm (40) projecting from the base section, and having a plurality of groove sections (42), the vibrating arm (40) is provided with the groove sections, and the groove sections (40) are each formed to have a length in a width direction of the vibrating arm (40) longer than a length in a longitudinal direction of the vibrating arm (40), and arranged side by side along the longitudinal direction of the vibrating arm (40).

Description

technical field [0001] In particular, the present invention relates to a vibrating piece having a groove in a vibrating arm, an electronic device, an electronic device, and a method for manufacturing the vibrating piece. Background technique [0002] A tuning-fork type piezoelectric vibrating reed as an example of a vibrating reed has a base and two vibrating arms formed to protrude from the base. Grooves are formed on the vibrating arm, and the grooves are provided on the front and back of the vibrating arm. Therefore, the cross-sectional shape of the vibrating arm is formed into a substantially H-shape. Such a tuning-fork piezoelectric vibrating piece can obtain excellent vibration performance with improved electric field efficiency, low vibration loss of the vibrating arm, and suppressed low CI value, and can reduce the overall shape of the vibrating piece. [0003] Currently, Patent Documents 1 to 3 can be cited as examples of such vibrating pieces. [0004] In the me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/215H03H3/02H10N30/082H10N30/00H10N30/01H10N30/20H10N30/80H10N30/85
CPCH03H9/21H03H2003/026H10N30/082
Inventor 山口啓一川内修
Owner SEIKO EPSON CORP