A jig for cleaning the insulation sheet of furnace tube equipment

A technology of heat preservation sheet and cleaning furnace, which is applied in the directions of cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc. Effectiveness of uptime, increased productivity, and reduced maintenance time

Active Publication Date: 2016-04-27
WUHAN XINXIN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, when cleaning the thermal insulation sheet of the furnace tube equipment, the cleaning action is completed by a special cleaning machine, but it is limited to the size of the cleaning basket of the cleaning equipment, and it is impossible to clean as many as 20 thermal insulation sheets of the furnace tube equipment at one time. put down
At present, the way to clean the insulation sheets of furnace tube equipment is to place the insulation sheets of furnace tube equipment in a row in a cleaning basket, and then soak them in acid solution. There is no overlap or extrusion between them; with this method, only 8 pieces can be cleaned at a time, and 20 pieces of furnace tube equipment insulation pieces need to be washed three times; at the same time, the frequency of acid solution replacement in the washing machine is 15, that is, cleaning The acid needs to be changed after 15 times of quartz, and it takes 5 hours to clean the insulation sheet of the furnace tube equipment once
In this way, it takes 15 hours to clean the insulation sheet of the furnace tube equipment. This method wastes acid and time, wastes resources and delays the recovery time

Method used

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  • A jig for cleaning the insulation sheet of furnace tube equipment
  • A jig for cleaning the insulation sheet of furnace tube equipment

Examples

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Embodiment Construction

[0017] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0018] Such as figure 1 As shown, a jig for cleaning the insulation sheet of furnace tube equipment includes a support seat and a support rod. There are two support seats, which are respectively the first support seat 1.1 and the second support seat 1.2. There are three rods, which are respectively the first support rod 2.1, the second support rod 2.2, and the third support rod 2.3. The first support, 2.1, and the second support rod 2.2 are all cylindrical support rods, and the third support The rod 2.3 is a square support rod, and the two ends of the first support rod 2.1 and the second support rod 2.2 are respectively fixed at the vertical middle positions on both sides of the first support base 1.1 and the second...

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PUM

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Abstract

The invention relates to a jig for cleaning furnace tube equipment heat insulation sheets. The jig comprises two supporting seats and three supporting rods, the supporting rods include a first supporting rod, a second supporting rod and a third supporting rod, two ends of the first supporting rod and two ends of the second supporting rod are correspondingly fixed to the vertical middles of two sides of the two supporting seats respectively, two ends of the third supporting rod are fixed to the vertical bottoms of the two supporting seats, and corresponding positions of the three supporting rods are respectively provided with one or a plurality of toothed clamp grooves. When cleaned, a plurality of furnace tube equipment heat insulation sheets can be placed into the toothed clamp grooves of the supporting rods and simultaneously cleaned, cleaning efficiency is improved, acid liquor is saved, the service time of the acid liquor is prolonged, machine maintenance time is shortened, and accordingly, energy production efficiency is improved.

Description

technical field [0001] The invention relates to a cleaning device for a thermal insulation sheet, in particular to a fixture for cleaning the thermal insulation sheet of furnace tube equipment. Background technique [0002] In the equipment manufacturer's design, the bottom of the crystal boat of the 12-inch furnace tube equipment is filled with multiple insulation sheets. Its purpose is twofold, one is to maintain the temperature of the furnace nozzle area in the reaction chamber, and the second is to press and drag the bottom of the crystal boat to lower the center of gravity of the crystal boat and prevent the position of the crystal boat from drifting. In every regular maintenance of the equipment, the crystal boat and the insulation sheet of the furnace tube equipment need to be cleaned, so as to maintain and improve the particle cleanliness of the equipment. Because the insulation sheet of the furnace tube equipment is located at the entrance of the reaction gas in th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/08B08B13/00
Inventor 周成志
Owner WUHAN XINXIN SEMICON MFG CO LTD
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