A polysilicon reduction furnace temperature control and energy saving system and process

Abstract

The invention discloses a temperature control and energy saving system and process for polycrystalline silicon reduction furnaces. The system is characterized by comprising a trichlorosilane concentrated carburetor, a hydrogen preheater, a pipeline static mixer, a reduction furnace, a silicon powder filter and a tail gas temperature-control cooler, wherein the hydrogen preheater 2 is connected to the pipeline static mixer 3, and the trichlorosilane concentrated carburetor is connected to a tube pass of the hydrogen preheater; the pipeline static mixer is connected to the reduction furnace; the tail gas outlet of the reduction furnace 4 is connected to the shell-pass high-temperature gas phase inlet of the tail gas temperature-control cooler, and the shell-pass low-temperature gas phase outlet of the tail gas temperature-control cooler is connected to the shell-pass gas phase inlet of the hydrogen preheater. According to the system and application method disclosed by the invention, feed compositions are uniform, the feed temperature is stable and controllable, the heat energy is used fully, the power consumption of the reduction furnace and the system is reasonably reduced, and the growth quality of polycrystalline silicon is controlled better; silicon powder of a tail gas pipeline is effectively removed, thereby protecting valves of the tail gas pipeline and facilities of a CDI (Capacitor Discharge Ignition) system.

Description

Technical field: [0001] The invention relates to polysilicon production, in particular to a temperature-controlled and energy-saving module system and process for a polysilicon reduction furnace, which belongs to the field of solar photovoltaics. Background technique: [0002] Since the 20th century, with the development of social economy and the improvement of people's living standards, the demand for energy has continued to grow. The finiteness of fossil energy resources and their impact on the global climate and environment during the combustion process have attracted increasing attention. From the perspective of resources, environment, and social development needs, it is an inevitable trend to develop and utilize new and renewable energy. In the family of new energy and renewable energy, solar energy has become the most eye-catching member with the most research work and the widest application. With the rapid development of the solar energy industry, there has been an ...

AI Technical Summary

Problems solved by technology

[0022] (1) Insufficient utilization of heat energy;

[0023] (2) The feed temperature is unstable and uncontrollable;

[0024] (3) The feed flow control of trichlorosilane is not timely;

[0025] ⑷ Cannot effectively remove the silicon powder in the exhaust pipe

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