A method of fabricating a self-tilting microelectromechanical system micromirror
A system micromirror and manufacturing method technology, applied in microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problem of axis and symmetry point offset, self-tilting structure can not be driven freely, can not achieve self-tilting, etc. problem, to achieve the effect of easy alignment and installation
Active Publication Date: 2016-06-22
无锡微文半导体科技有限公司
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Problems solved by technology
The disadvantage of this design method is that it cannot achieve self-tilting, and it always needs to be driven during the tilting process.
And some self-tilting structures cannot be driven freely, or the axis and symmetry point will shift during the driving process
Method used
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[0041] Such as figure 1 , 2 A kind of self-tilting MEMS micromirror shown comprises micromirror frame 1, mirror body 3 and drive arm 2, mirror body 3 is connected with micromirror frame 1 by drive arm 2, is driven to deflect and tilt by it, and described drive arm is in In the passive initial state, the mirror body 3 is in a self-tilting state.
[0042] Such as Figure 3a , 3b As shown, several materials with different thermal expansion coefficients are used, and MEMS micromachining processes, such as evaporation, sputtering, PECVD, etc., are used. The temperature during the process is generally higher than room temperature. Although it is a flat structure in the process, but Since the device needs to be cooled to room temperature to form a temperature difference after the device is fabricated, it will shrink to the side with the higher thermal expansion rate when it reaches room temperature. Therefore, structures deflecting in completely different directions can be formed...
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The invention discloses a self-tilting MEMS micromirror, which includes a micromirror frame, a mirror body and a driving arm, the mirror body is connected to the micromirror frame through the driving arm, and is driven to deflect and tilt, and is characterized in that: the driving arm In the passive initial state, the mirror body is in a self-tilting state. A method for manufacturing a self-tilting microelectromechanical system micromirror, characterized in that: the driving arm is formed by stacking several materials with different thermal expansion coefficients, and is made into a flat structure at a process temperature higher than room temperature, and cooled to room temperature After release, the drive arm shrinks toward the side with the higher thermal expansion rate. The initial state of the structure of the present invention is self-tilting at a certain angle, which is convenient for the alignment and installation of the optical path. In addition, without special technology, the micromirror can achieve a self-tilting structure, and the center can be kept fixed during the driving process. The inclination angle can be freely controlled according to the design layout and process.
Description
[0001] The present invention is a divisional application of application date: 2012-2-24, application number: 2012100432792: "a self-tilting microelectromechanical system micromirror and its manufacturing method". technical field [0002] The invention belongs to the field of micro-electro-mechanical systems (MEMS), and relates to the design and manufacture of a micro-mirror structure of a self-tilting micro-electro-mechanical system. Background technique [0003] Miniaturization, high performance, low cost, and large quantities are the pursuit goals of today's device manufacturing. MEMS technology came into being at this time and was widely used by the majority of equipment manufacturers. Devices manufactured using MEMS technology can be mainly divided into two categories. One is purely miniaturized traditional devices, such as micro-optical platforms, whose advantages are concentrated in expanding the use of miniaturized systems; Devices that cannot be produced by traditio...
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IPC IPC(8): G02B26/08B81C1/00
Inventor 周亮陈巧谢会开
Owner 无锡微文半导体科技有限公司