Evaporation equipment

Abstract

The invention relates to the technical filed of manufacturing of display devices and discloses evaporation equipment. The equipment is capable of realizing the continuous evaporation, increasing the production efficiency and reducing the production cost. The evaporation equipment comprises an evaporation chamber, a replacement chamber, a valve, vacuum-pumping equipment and control equipment, wherein a crucible replacing plate capable of containing a crucible, a clamp and at least one evaporation device for heating the crucible are arranged in the evaporation chamber; a crucible replacing plate capable of containing the crucible is arranged in the replacement chamber; the valve is used for communicating or isolating the evaporation chamber and the replacement chamber; the vacuum-pumping equipment is used for carrying out vacuum pumping on the replacement chamber; the control equipment is used for controlling the clamp to clamp the crucible to change the position between the evaporation position and the crucible replacing plate in the evaporation chamber and clamp the crucible replacing plate to change the position between the evaporation chamber and the replacement chamber when the valve is opened. By means of the evaporation equipment, cooling or vacuum breaking is not needed when evaporation materials are added in the evaporation chamber, so that the evaporation equipment is capable of carrying out the continuous evaporation, greatly increasing the production efficiency and reducing the production cost.

Description

technical field [0001] The present invention relates to the technical field of manufacturing display devices, in particular to an evaporation equipment. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode, referred to as OLED) display is thin, light, wide viewing angle, active light, continuously adjustable light color, low cost, fast response, low energy consumption, driving voltage Low temperature, wide operating temperature range, simple production process, high luminous efficiency and flexible display, etc., have been listed as a promising next-generation display technology. [0003] Forming an OLED device on a substrate usually uses an evaporation process, which refers to heating the evaporation material under a certain vacuum condition, so that the evaporation material is melted (or sublimated) into a vapor composed of atoms, molecules or atomic groups, and then condensed on the surface of the substrate Film formation, thereb...

AI Technical Summary

Problems solved by technology

It can be seen that the existing evaporation equipment cannot perform continuous evaporation, the production efficiency is low, and the production cost is high. In addition, adding evaporation materials to the evaporation chamber can easily lead to dust entry, thereby causing substrate contamination

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