MEMS vector hydrophone encapsulation structure with vibration isolation function

A technology of vector hydrophone and packaging structure, which is applied to measuring devices, vibration measurement in fluids, instruments, etc., can solve problems affecting the signal-to-noise ratio of hydrophones, and achieve easy production and assembly, convenient application, and compact structure Effect

Active Publication Date: 2015-07-15
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, hydrophones based on MEMS technology have tended to mature, but the noise of MEMS hydrophone installation platforms (such as ship mechanical equipment vibration noise, propeller vibration noise and hydrodynamic noise, etc.) has seriously affected the hydrophone's performance. Signal-to-noise ratio, in view of this fact, it is imminent to design a reasonable MEMS vector hydrophone vibration isolation device

Method used

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  • MEMS vector hydrophone encapsulation structure with vibration isolation function
  • MEMS vector hydrophone encapsulation structure with vibration isolation function
  • MEMS vector hydrophone encapsulation structure with vibration isolation function

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with accompanying drawing:

[0029] like figure 1 , 2, 3, a MEMS vector hydrophone packaging structure with a vibration isolation function, including an outer pillar 1, the outer pillar 1 is provided with an axial first lead hole 1-1 and the first lead hole 1-1 Connected installation cavity 1-2, the opening of the installation cavity 1-2 is located at the bottom of the outer pillar 1, the bottom of the outer pillar 1 is threadedly connected with a plug 2 for sealing the installation cavity 1-2, and installed in the installation cavity 1-2 There is an enlarged circuit board 3; the top of the outer pillar 1 is threaded with a soft pillar 4, and the soft pillar 4 is provided with a second lead hole 4-1 in the axial direction and communicated with the first lead hole 1-1 in the outer pillar 1, The top of the soft pillar 4 is threadedly connected with a support chassis 5, and the support chassis 5 is pro...

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Abstract

The invention relates to an MEMS (Micro-electromechanical System) vector hydrophone encapsulation structure with a vibration isolation function, which reduces the influence of a working environment on a performance index of an MEMS vector hydrophone. The structure comprises an external strut internally provided with an amplifying circuit board, a soft strut, a support chassis and a sound transparent cap, wherein a soft bearing is mounted on the support chassis and comprises a support column body provided with buffer holes and buffer bumps; a bottom plate and a mounting groove are arranged and formed at the top of the support column body; and the MEMS vector hydrophone is mounted in the mounting groove. During detection, when vibration noise of a working platform is in a transmission path from the external strut to the MEMS hydrophone, the external strut can block most noise contribution, higher than inherent frequency of a soft support structure, in the noise, and the soft bearing can filter off the partial vibration noise not blocked by the soft support structure. The structure innovatively employs characteristics and structural design of an encapsulation material to meet vibration isolation requirements of the hydrophone, is simple in design and structure and has an obvious vibration isolation effect.

Description

technical field [0001] The invention relates to the technical field of MEMS vector hydrophones, in particular to a package structure of MEMS vector hydrophones with a vibration isolation function. Background technique [0002] Vector hydrophone, as a sensor capable of measuring the vector information of underwater sound field with time synchronization and space co-point, has a wide application prospect in ocean engineering and ocean development. The application of MEMS vector hydrophones has greatly improved the acquisition technology of underwater sound information. However, due to its complex working environment and various installation platforms, the vibration of the installation platform will be transmitted to the sensitive unit along the rigid structure, which seriously affects the accuracy of the measurement results. accuracy, sensitivity, etc. In order to improve the application effect of the MEMS vector hydrophone, it is necessary to consider many aspects, among whi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H3/00
Inventor 张国军何常德郭静李振郭楠薛晨阳刘俊张文栋
Owner ZHONGBEI UNIV
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