Fixing device for transmission electron microscope samples

A technology for electron microscopes and fixtures, applied in circuits, discharge tubes, electrical components, etc., and can solve problems such as flat-blade screws, lost samples, and dropped

Inactive Publication Date: 2014-01-22
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the operation, because the screwdriver is often used to rotate the flat-head screw until it is fully screwed into the sample rod and fixed, long-term wear and tear will cause the flat-blade screw to slip, and the sample may not even be c

Method used

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  • Fixing device for transmission electron microscope samples
  • Fixing device for transmission electron microscope samples
  • Fixing device for transmission electron microscope samples

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Embodiment Construction

[0016] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: the present embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation is provided, but the protection scope of the present invention is not limited to the following embodiments.

[0017] see Figure 2a , 2b as well as image 3 , the fixing device of the transmission electron microscope sample involved in the present invention includes: a sample rod 3 for carrying the sample 1, a spring screw 5 fixedly connected to the sample rod 3, and a shrapnel 4, and the spring screw 5 passes through The first end of the elastic piece 4 . The spring screw 5 has a locked state and a released state. When the spring screw 5 is in the locked state, the second end of the shrapnel 4 abuts against the sample 1. At this time, the spring of the spring screw 5 itself The pressure is transmitted to the shrapnel, w...

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Abstract

The invention discloses a fixing device for transmission electron microscope samples, and belongs to the technical field of semiconductor manufacturing equipment. The fixing device comprises a sample rod, an elastic sheet and a spring screw, wherein the sample rod is used for carrying the samples, the spring screw is fixedly connected onto the sample rod, passes through the first end of the elastic sheet and has a locking state and a release state, when the spring screw is in the locking state, the second end of the elastic sheet is butted on the samples, and when the spring screw is in the release state, the elastic sheet is disengaged from the samples. The structure is adopted, and the fixing and the taking of the samples can be realized through manually operating the spring screw. The method has the advantages that the thread slippage problem generated in the screw fixing process is solved, the sample fixing and taking time of the transmission electron microscope samples is effectively shortened, the use efficiency of a transmission electron microscope is improved, the service life of the fixing screw is prolonged, and in addition, the use cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and in particular relates to a fixing device for transmission electron microscope samples on a sample rod. Background technique [0002] Transmission Electron Microscope (hereinafter referred to as TEM) can simultaneously analyze the microstructure, crystal structure, constituent elements, chemical bonding state, and electron distribution structure of micro-regions. It is one of the powerful tools for solid material analysis. [0003] With the continuous development of the semiconductor industry, the continuous improvement of technology, the continuous reduction of chip size, and the increasingly diversified, three-dimensional, and miniaturized growth of materials, the interfaces, strain states, strain relaxation and The subsequent formation of lattice mismatch dislocations, etc., provides a broad development space for the use of TEM. [0004] The imaging principle ...

Claims

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Application Information

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IPC IPC(8): H01J37/20
Inventor 高林史燕萍陈强高金德
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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