Fixing device for transmission electron microscope samples

Abstract

The invention discloses a fixing device for transmission electron microscope samples, and belongs to the technical field of semiconductor manufacturing equipment. The fixing device comprises a sample rod, an elastic sheet and a spring screw, wherein the sample rod is used for carrying the samples, the spring screw is fixedly connected onto the sample rod, passes through the first end of the elastic sheet and has a locking state and a release state, when the spring screw is in the locking state, the second end of the elastic sheet is butted on the samples, and when the spring screw is in the release state, the elastic sheet is disengaged from the samples. The structure is adopted, and the fixing and the taking of the samples can be realized through manually operating the spring screw. The method has the advantages that the thread slippage problem generated in the screw fixing process is solved, the sample fixing and taking time of the transmission electron microscope samples is effectively shortened, the use efficiency of a transmission electron microscope is improved, the service life of the fixing screw is prolonged, and in addition, the use cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and in particular relates to a fixing device for transmission electron microscope samples on a sample rod. Background technique [0002] Transmission Electron Microscope (hereinafter referred to as TEM) can simultaneously analyze the microstructure, crystal structure, constituent elements, chemical bonding state, and electron distribution structure of micro-regions. It is one of the powerful tools for solid material analysis. [0003] With the continuous development of the semiconductor industry, the continuous improvement of technology, the continuous reduction of chip size, and the increasingly diversified, three-dimensional, and miniaturized growth of materials, the interfaces, strain states, strain relaxation and The subsequent formation of lattice mismatch dislocations, etc., provides a broad development space for the use of TEM. [0004] The imaging principle ...

AI Technical Summary

Problems solved by technology

However, during the operation, because the screwdriver is often used to rotate the flat-head screw until it is fully screwed into the sample rod and fixed, long-term wear and tear will cause the flat-blade screw to slip, and the sample may not even be completely fixed on the sample rod, resulting in The sample falls into the lens barrel during the observation process of the transmission electron microscope, which eventually leads to the loss of the sample or even the failure of the electron microscope

Images