Dual-translation orthogonal decoupling parallel micro-positioning platform

Abstract

The invention provides a dual-translation orthogonal decoupling parallel micro-positioning platform which comprises a motion workbench, a fixed platform, four pairs of motion branched chains and two driving branched chains, wherein the motion branched chains and the driving branched chains are connected between the motion workbench and the fixed platform. The dual-translation orthogonal decoupling parallel micro-positioning platform is characterized in that the motion workbench is a cube, two adjacent side faces of the motion workbench are provided with horizontal semicircular grooves, the fixed platform is a rectangular block with a square groove in the middle, one ends of the motion branched chains are correspondingly connected with the four side faces of the motion workbench, the other ends of the motion branched chains are correspondingly connected with the four side faces of the square groove of the fixed platform, the two drive branched chains are drive blocks, wherein two side faces opposite to each other of the two drive branched chains are respectively provided with a horizontal semicircular groove and circular pressing marks, the side face, with the horizontal semicircular groove, of each drive block is pressed on the side face, with the horizontal semi circular groove, of the motion workbench through a hard ball, and the side face, with the circular concave marks, of the drive block is connected with the fixed platform through a piezoelectric ceramic driver. The dual-translation orthogonal decoupling parallel micro-positioning platform can completely achieve completely-decoupled dual-freedom degree translation, and the motion branched chains enhance the rigidity and bearing capacity of the micro-positioning platform.

Description

Technical field [0001] The invention belongs to the field of manufacturing technology, and specifically relates to a two translational orthogonal decoupling parallel micro-motion platform. Background technique [0002] Parallel micro-motion platform has the advantages of large structural rigidity, high displacement resolution, fast response speed, and compact structure. It is widely used in various micro-nano positioning systems, such as ultra-precision machining, scanning probe microscope, MEMS (microelectronic machinery Systems), biological engineering, aerospace and other fields, and play an important role. [0003] At present, many researchers at home and abroad have successively carried out related research work. Ellis proposed to use a parallel mechanism as a micro-manipulation manipulator and applied to biotechnology and microsurgery; Magnani and Pernette studied rotating joints, moving joints, Hooke hinges and The flexible hinge form of the spherical hinge; Kallio develope...

AI Technical Summary

Problems solved by technology

[0004] Although many scholars at home and abroad have studied parallel micro-motion platforms, most of these research results and patented technologies meet certain motion accuracy requirements, but they have not considered how to effectively improve the stiffness of the micro-motion platform when it has a large bearing capacity. Not fully decoupled

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