A kind of preparation method of spherical aluminum nitride powder

A technology of aluminum nitride powder and aluminum nitride, which is applied in the field of preparation of spherical aluminum nitride powder, can solve the problems of poor shape uniformity of aluminum nitride powder products, affecting the application of aluminum nitride, and low product purity, and achieves The effect of low raw material cost, low cost and high product yield
CN103588182BActive Publication Date: 2015-11-25咸阳瞪羚谷新材料科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
咸阳瞪羚谷新材料科技有限公司
Publication Date
2015-11-25

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Abstract

The invention provides a method for preparing a spherical aluminum nitride powder. The method comprises the following steps of: 1, mixing aluminum powder with aluminum nitride powder and ammonium chloride powder, putting the mixture into a mortar for grinding, wherein the aluminum powder is spherical aluminum powder having the particle size range from 0.5 micron to 3 microns; and the aluminum nitride powder is prepared from an aluminum source which is spherical aluminum powder having the same particle size with the raw material aluminum powder through in-situ nitrogenation; 2, putting the evenly ground powder in a porous graphite crucible with a graphitic carbon felt exterior heat preservation layer and an interior protective layer and reacting in a reaction device; 3, electrifying graphite paper, and igniting the powder from bottom to cause a combustion reaction; 4, after natural cooling, releasing nitrogen in the reaction chamber, and opening the reaction device, and obtaining an off-white powder in the porous graphite crucible, namely the spherical aluminum nitride powder; and 5, controlling the particle size of the spherical aluminum nitride powder through the particle size of the spherical aluminum powder. The method provided by the invention has the characteristics of low energy consumption, simple process and low cost; and the prepared spherical aluminum nitride powder is good in homogeneity and controllable in particle size.
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Description

technical field

[0001] The invention belongs to the technical field of preparation of semiconductor functional materials, and in particular relates to a preparation method of spherical aluminum nitride powder. Background technique

[0002] Aluminum nitride (AlN), as an important group III wide bandgap semiconductor material, has a series of high thermal conductivity, high insulation coefficient, low dielectric constant, thermal expansion coefficient matched with silicon, excellent mechanical properties and chemical stability, etc. Excellent characteristics. Therefore, aluminum nitride can be used to make advanced ceramic components, heat dissipation components, electronic ceramic substrates and electronic component packaging materials. In the process of preparing the above materials / components, the spherical aluminum nitride powder raw material with a particle size of several microns to tens of microns has many advantages. For example, spherical aluminum nitride powder can...

Claims

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