A method for manufacturing a light-emitting diode wire electrode
A technology of light-emitting diodes and wire-bonded electrodes, which is applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of affecting the quality of light-emitting diodes, the bonding force between leads and electrodes cannot be greatly improved, and off-lines, etc.
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[0018] see Figure 1-5 The method for manufacturing the wire-bonding electrodes of the light-emitting diode proposed by the present invention is introduced.
[0019] see Figure 1-2 , the manufacturing method of light-emitting diode bonding electrode comprises the following steps:
[0020] (1) Forming the p-type semiconductor layer 100 , the semiconductor light-emitting layer 200 and the n-type semiconductor layer 300 sequentially from bottom to top;
[0021] (2) forming a transparent flat electrode 10 on the n-type semiconductor layer 300;
[0022] (3) Evaporating a metal alloy layer on the flat electrode 10;
[0023] (4) performing photolithography and etching processes on the alloy metal layer, so as to form the metal alloy layer into bump electrodes 20 ;
[0024] (5) Roughen the upper surface and all side surfaces of the bump electrode 20 to form a bump roughened electrode 201
[0025] see image 3 ,Should image 3 It shows the top view of the electrode produced by t...
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