Laser height measuring device and component mounting machine

Abstract

This laser height measuring device is provided with: a laser height sensor (6) comprising a laser beam irradiation section (61) for emitting a laser beam (L1) and a reflected light detection section (62) for detecting the laser beam reflected off an object to be irradiated; a sensor movement mechanism (head drive mechanism (41-43)) for moving the laser height sensor (6) within a plane; an imaging camera (component camera (5)) that is provided at a predetermined calibrating position (light incidence axis (AO); a neutral density filter (71) that allows the laser beam (L1) to pass while attenuating the laser beam; a laser beam imaging means that positions the laser height sensor (6) at the calibrating position (AO), emits the laser beam (L1), and captures an image of the laser beam which has passed the neutral density filter (71) using the imaging camera (5) in order to obtain a laser beam image; and a correction value acquisition means that obtains values for correcting the coordinates of the laser beam on the basis of the position of the laser beam in the laser beam image. Thus, the measuring position can be controlled accurately, and the accuracy of measuring position control can be maintained without requiring a sensor installation position adjustment mechanism or a positional adjustment operation.

Description

Technical field [0001] The present invention relates to a laser height measuring device that uses a laser to measure the height of an object and a component mounting machine that assembles the laser height measuring device to measure the height of the upper surface of a substrate. More specifically, it relates to a measuring position for measuring height Correction unit. Background technique [0002] As a board production machine that performs a production operation on a board, there are solder printers, component mounting machines, reflow machines, board inspection machines, etc., and a board production line is generally constructed by connecting these machines with a board transport device. Among them, the component mounting machine is equipped with: a substrate transport device, which carries in, positions, and unloads the substrate relative to the component mounting position; a component supply device, which supplies components; a component transfer device, which picks up com...

AI Technical Summary

Problems solved by technology

[0005] On the other hand, the height measurement accuracy of the laser height sensor is easily affected by the surface state of the target substrate

For example, if the height is not constant within the area required for the measurement, the height measurement accuracy will decrease

In addition, the reflectivity of laser light varies depending on the material of the surface, and the reflectivity of the land pattern is high, while the reflectivity of the substrate material is low, which may cause a decrease in the accuracy of height measurement.

For example, even if the measurement position is set within a predetermined mark or land pattern, if the laser irradiation position protrudes from the mark or land pattern during actual measurement due to the control error of the measurement position, the accuracy of height measurement will decrease.

Images